Issued Patents All Time
Showing 25 most recent of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9348202 | Lamp unit and projector employing same | Hiroyuki Inoue, Hideharu Saito, Takashi Omori | 2016-05-24 |
| 8807761 | Lamp unit and projector employing same | Hiroyuki Inoue, Hideharu Saito, Takashi Omori | 2014-08-19 |
| 7608593 | Resin composition with biodegradable non-liquid-crystalline and liquid-crystalline polymers | — | 2009-10-27 |
| 7295357 | Apparatus for handling minute object | — | 2007-11-13 |
| 7291679 | Recyclable polymer and process for production thereof | Chieko Mihara, Yoshihiko Kikuchi | 2007-11-06 |
| 7122297 | Photosensitive resin composition, resist composition, fabrication method for patterned substrate, and device | — | 2006-10-17 |
| 7072438 | Reflection type mask | Keiko Chiba, Masami Tsukamoto, Yutaka Watanabe, Shinichi Hara | 2006-07-04 |
| 7064113 | Resin composition, method of molding the same, and method of recycling resin composition | — | 2006-06-20 |
| 7019043 | Decomposable resin composition and method for producing the same | — | 2006-03-28 |
| 7009007 | Recyclable polymer, process for production thereof, and recycling treatment thereof | Chieko Mihara, Yoshihiko Kikuchi | 2006-03-07 |
| 6872952 | Electron optical system array, method of manufacturing the same, charged-particle beam exposure apparatus, and device manufacturing method | Yasuhiro Shimada, Takayuki Yagi, Haruhito Ono | 2005-03-29 |
| 6866973 | Photosensitive resin composition, resist composition, fabricating method for patterned substrate, and device | — | 2005-03-15 |
| 6829091 | Optical system and optical instrument with diffractive optical element | Takashi Kato, Kenji Saitoh, Makoto Ogusu, Keiko Chiba | 2004-12-07 |
| 6795166 | Illuminator, exposure apparatus, and method for fabricating device using the same | Hideo Kato | 2004-09-21 |
| 6728332 | X-ray mask, and exposure method and apparatus using the same | Keiko Chiba, Masami Tsukamoto, Yutaka Watanabe, Shinichi Hara | 2004-04-27 |
| 6652781 | Method for manufacture of optical element | Hideo Kato, Makoto Ogusu | 2003-11-25 |
| 6653364 | Decomposable resin composition and method for producing the same | — | 2003-11-25 |
| 6603128 | Charged-particle beam exposure apparatus and device manufacturing method | Haruhito Ono, Yasuhiro Shimada, Takayuki Yagi | 2003-08-05 |
| 6594012 | Exposure apparatus | Seiji Takeuchi, Minoru Yoshii | 2003-07-15 |
| 6479212 | Photosensitive resin, resist composition using the photosensitive resin, pattern formation method using the resist composition, device produced by the pattern formation method, and exposure method | Minoru Matsuda, Keita Sakai | 2002-11-12 |
| 6476968 | Optical element | Hideo Kato | 2002-11-05 |
| 6421188 | Optical element | — | 2002-07-16 |
| 6337161 | Mask structure exposure method | Keiko Chiba, Hideo Kato | 2002-01-08 |
| 6317479 | X-ray mask, and exposure method and apparatus using the same | Keiko Chiba, Masami Tsukamoto, Yutaka Watanabe, Shinichi Hara | 2001-11-13 |
| 6317274 | Optical element | Hideo Kato | 2001-11-13 |