Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8361336 | Imprint method for imprinting a pattern of a mold onto a resin material of a substrate and related substrate processing method | Shingo Okushima, Junichi Seki, Nao Nakatsuji, Atsunori Terasaki | 2013-01-29 |
| 8337712 | Method for forming etching mask, method for fabricating three-dimensional structure and method for fabricating three-dimensional photonic crystalline laser device | Kenji Tamamori, Masahiko Okunuki, Shinan Wang, Taiko Motoi, Toshiaki Aiba | 2012-12-25 |
| 8191994 | Liquid ejection head utilizing deflection members | Toru Nakakubo, Takahisa Kato, Suguru Miyagawa | 2012-06-05 |
| 8084365 | Method of manufacturing a nano structure by etching, using a substrate containing silicon | Taiko Motoi, Kenji Tamamori, Shinan Wang, Masahiko Okunuki, Toshiaki Aiba +1 more | 2011-12-27 |
| 7902637 | Nano structure and method of manufacturing nano structure | Taiko Motoi, Kenji Tamamori, Shinan Wang, Masahiko Okunuki, Toshiaki Aiba +1 more | 2011-03-08 |
| 7727410 | Process for formation of three-dimensional photonic crystal | Shinan Wang, Kenji Tamamori, Masahiko Okunuki | 2010-06-01 |
| 7700390 | Method for fabricating three-dimensional photonic crystal | Shinan Wang, Kenji Tamamori, Taiko Motoi, Masahiko Okunuki, Toshiaki Aiba | 2010-04-20 |
| 7611810 | Charged beam processing apparatus | Masahiko Okunuki, Shinan Wang, Kenji Tamamori | 2009-11-03 |
| 7126141 | Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method | Masato Muraki | 2006-10-24 |
| 7109494 | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus using deflector | Masatake Akaike, Kenji Tamamori, Futoshi Hirose, Yasushi Koyama, Atsunori Terasaki +2 more | 2006-09-19 |
| 7060984 | Multi-charged beam lens and charged beam exposure apparatus using the same | Kenichi Nagae, Sayaka Tanimoto | 2006-06-13 |
| 7038226 | Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method | Masato Muraki | 2006-05-02 |
| 6965153 | Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method | Masato Muraki | 2005-11-15 |
| 6946662 | Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method | Kenichi Nagae, Masaki Takakuwa, Yoshinori Nakayama, Harunobu Muto | 2005-09-20 |
| 6903345 | Electron optical system, charged-particle beam exposure apparatus using the same, and device manufacturing method | Takayuki Yagi | 2005-06-07 |
| 6872951 | Electron optical system array, charged-particle beam exposure apparatus using the same, and device manufacturing method | Takayuki Yagi, Yasuhiro Shimada | 2005-03-29 |
| 6872950 | Electron optical system array, method of fabricating the same, charged-particle beam exposure apparatus, and device manufacturing method | Yasuhiro Shimada, Takayuki Yagi | 2005-03-29 |
| 6872952 | Electron optical system array, method of manufacturing the same, charged-particle beam exposure apparatus, and device manufacturing method | Yasuhiro Shimada, Takayuki Yagi, Hiroshi Maehara | 2005-03-29 |
| 6603128 | Charged-particle beam exposure apparatus and device manufacturing method | Hiroshi Maehara, Yasuhiro Shimada, Takayuki Yagi | 2003-08-05 |
| 6559463 | Mask pattern transfer method, mask pattern transfer apparatus using the method, and device manufacturing method | Yoshikiyo Yui, Masato Muraki | 2003-05-06 |
| 6335127 | Charged beam mask having strut wider than charged beam, with shape that matches charged beam | — | 2002-01-01 |
| 6157137 | Multi-electron beam source with driving circuit for preventing voltage spikes | Hidetoshi Suzuki, Ichiro Nomura, Tetsuya Kaneko | 2000-12-05 |
| 6011567 | Image forming apparatus | Naoto Nakamura, Ichiro Nomura, Hidetoshi Suzuki, Tetsuya Kaneko, Toshihiko Takeda +1 more | 2000-01-04 |
| 6005333 | Electron beam-generating device, and image-forming apparatus and recording apparatus employing the same | Tetsuya Kaneko, Ichiro Nomura, Hidetoshi Suzuki, Yoshikazu Banno, Shinya Mishina | 1999-12-21 |
| 5757123 | Electron-beam generator and image display apparatus making use of it | Ichiro Nomura, Toshihiko Takeda, Yoshikazu Banno, Tetsuya Kaneko, Hidetoshi Suzuki | 1998-05-26 |