Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7034321 | Electron beam exposure apparatus and electron beam measurement module | Yoshinori Nakayama, Gen Nakamura | 2006-04-25 |
| 7015482 | Electron beam writing equipment using plural beams and method | Yasunari Sohda, Yoshinori Nakayama, Osamu Kamimura, Masato Muraki | 2006-03-21 |
| 6969862 | Charged-particle-beam exposure apparatus and method of controlling same | Masato Muraki, Osamu Kamimura | 2005-11-29 |
| 6946662 | Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method | Haruhito Ono, Kenichi Nagae, Yoshinori Nakayama, Harunobu Muto | 2005-09-20 |
| 6870310 | Multibeam generating apparatus and electron beam drawing apparatus | Masahiko Okunuki, Hiroya Ohta, Norio Saito, Sayaka Tanimoto, Takeshi Haraguchi | 2005-03-22 |
| 6807864 | Pressure sensor with water repellent filter | Masahito Imai | 2004-10-26 |
| 6768118 | Electron beam monitoring sensor and electron beam monitoring method | Yoshinori Nakayama, Yasunari Sohda, Hiroya Ohta, Norio Saitou, Masato Muraki | 2004-07-27 |
| 6575038 | Pressure sensor and method for assembling the same | Michitaka Hayashi, Hironobu Baba, Masahito Imai | 2003-06-10 |
| 6085598 | Pressure sensor device having breakable mounting member | Hironobu Baba, Michitaka Hayashi, Masahito Imai, Akiteru Takae, Tokuhisa Nomura +1 more | 2000-07-11 |
| 5900554 | Pressure sensor | Horonobu Baba, Tiaki Mizuno, Masahito Imai, Yuichi Yokoyama, Yasuki Shimoyama | 1999-05-04 |
| 5747694 | Pressure sensor with barrier in a pressure chamber | Horonobu Baba, Tiaki Mizuno, Masahito Imai, Yuichi Yokoyama, Yasuki Shimoyama | 1998-05-05 |