Issued Patents All Time
Showing 1–25 of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11435178 | Calibration sample, electron beam adjustment method and electron beam apparatus using same | Yasunari Sohda, Kaori Bizen, Hiroya Ohta, Yusuke Abe | 2022-09-06 |
| 10438771 | Measurement device, calibration method of measurement device, and calibration member | Michio Hatano, Masaru Matsuzaki, Hiroki Kawada, Yoshinori Momonoi, Zhigang Wang | 2019-10-08 |
| 9200896 | Pattern dimension measurement method and charged particle beam microscope used in same | Keiichiro Hitomi, Junichi Tanaka | 2015-12-01 |
| 9110384 | Scanning electron microscope | Seiko Omori, Junichi Tanaka, Keiichiro Hitomi | 2015-08-18 |
| 8735816 | Standard member for calibration and method of manufacturing the same and scanning electron microscope using the same | Takashi Tase, Jiro Yamamoto, Osamu Inoue | 2014-05-27 |
| 8478021 | Charged beam device | Kaori Shirahata, Keiichiro Hitomi, Muneyuki Fukuda, Yasunari Sohda | 2013-07-02 |
| 8373113 | Calibration standard member, method for manufacturing the member and scanning electronic microscope using the member | Takashi Tase, Jiro Yamamoto | 2013-02-12 |
| 8268209 | Pattern forming method and its mold | Masahiko Ogino, Akihiro Miyauchi, Takashi Ando, Chiseki Haginoya, Susumu Komoriya +3 more | 2012-09-18 |
| 8263929 | Standard member for correction, scanning electron microscope using same, and scanning electron microscope correction method | Yasunari Sohda, Keiichiro Hitomi | 2012-09-11 |
| 8064681 | Method and apparatus for inspecting reticle | Nobuhiro Okai, Shinji Okazaki, Yasunari Sohda | 2011-11-22 |
| 7952083 | Ion beam system and machining method | Hiroyasu Shichi, Muneyuki Fukuda, Masaki Hasegawa, Satoshi Tomimatsu | 2011-05-31 |
| 7947964 | Charged particle beam orbit corrector and charged particle beam apparatus | Hiroyuki Ito, Yuko Sasaki, Tohru Ishitani | 2011-05-24 |
| 7943903 | Defect inspection method and its system | Shinji Okazaki, Shoji Hotta, Yasunari Sohda | 2011-05-17 |
| 7875850 | Standard component for calibration and electron-beam system using the same | Yasunari Sohda, Keiichiro Hitomi | 2011-01-25 |
| 7834997 | Standard component for calibration and calibration method using it and electro beam system | — | 2010-11-16 |
| 7750296 | Scanning electron microscope and calibration of image distortion | Keiichiro Hitomi, Yasunari Sohda, Hajime Koyanagi | 2010-07-06 |
| 7683313 | Charged particle beam measurement equipment, size correction and standard sample for correction | Yasunari Sohda, Hajime Koyanagi, Keiichiro Hitomi | 2010-03-23 |
| 7612334 | Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same | Yasunari Sohda, Keiichiro Hitomi, Hajime Koyanagi | 2009-11-03 |
| 7595482 | Standard component for length measurement, method for producing the same, and electron beam metrology system using the same | — | 2009-09-29 |
| 7476882 | Calibration method for electron-beam system and electron-beam system | Yasunari Sohda | 2009-01-13 |
| 7425714 | Measurement method of electron beam current, electron beam writing system and electron beam detector | Makoto Sakakibara, Hiroya Ohta, Yasunari Sohda, Noriyuki Tanaka, Yasuhiro Someda | 2008-09-16 |
| 7423274 | Electron beam writing system and electron beam writing method | Hiroya Ohta, Makoto Sakakibara, Yasunari Sohda, Masaki Hosoda | 2008-09-09 |
| 7365306 | Standard member for length measurement, method for producing the same, and electron beam length measuring device using the same | — | 2008-04-29 |
| 7358495 | Standard reference for metrology and calibration method of electron-beam metrology system using the same | — | 2008-04-15 |
| 7326942 | Ion beam system and machining method | Hiroyasu Shichi, Muneyuki Fukuda, Masaki Hasegawa, Satoshi Tomimatsu | 2008-02-05 |