Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714304 | Charged particle beam apparatus | Muneyuki Fukuda, Akihiro Miura, Fumihiro Sasajima, Hiroaki Mito | 2020-07-14 |
| 10665420 | Charged particle beam apparatus | Yasunori Takasugi, Satoru Yamaguchi, Kei Sakai, Hideki ITAI, Toshimasa Kameda +1 more | 2020-05-26 |
| 10546715 | Charged particle beam device | Shahedul Hoque, Hajime Kawano, Hideki ITAI, Minoru Yamazaki, Hiroshi Nishihama | 2020-01-28 |
| 10438771 | Measurement device, calibration method of measurement device, and calibration member | Michio Hatano, Yoshinori Nakayama, Masaru Matsuzaki, Hiroki Kawada, Zhigang Wang | 2019-10-08 |
| 10340115 | Charged particle beam apparatus | Muneyuki Fukuda, Akihiro Miura, Fumihiro Sasajima, Hiroaki Mito | 2019-07-02 |
| 10217604 | Charged particle beam apparatus | Makoto Sakakibara, Hajime Kawano, Makoto Suzuki, Yuji Kasai, Daisuke Bizen | 2019-02-26 |
| 10186399 | Scanning electron microscope | Mayuka Osaki, Chie Shishido, Maki Tanaka, Hitoshi Namai, Fumihiro Sasajima +1 more | 2019-01-22 |
| 10101150 | Height measurement device and charged particle beam device | Hiroki Kawada, Muneyuki Fukuda, Shou Takami | 2018-10-16 |
| 9892887 | Charged particle beam apparatus | Muneyuki Fukuda, Akihiro Miura, Fumihiro Sasajima, Hiroaki Mito | 2018-02-13 |
| 9521372 | Pattern measuring apparatus, pattern measuring method, and computer-readable recording medium on which a pattern measuring program is recorded | Koichi Hamada, Yuji Takagi, Michio Hatano, Hideyuki Kazumi | 2016-12-13 |
| 9472376 | Scanning electron microscope | Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hiroshi Makino, Yuzuru Mizuhara +2 more | 2016-10-18 |
| 9123504 | Semiconductor inspection device and semiconductor inspection method using the same | Atsuko Yamaguchi, Junichi Tanaka, Hiroki Kawada | 2015-09-01 |
| 8401273 | Apparatus for evaluating degradation of pattern features | Atsuko Yamaguchi, Taro Osabe | 2013-03-19 |
| 6977229 | Manufacturing method for semiconductor devices | Kenetsu Yokogawa, Masaru Izawa | 2005-12-20 |
| 6713401 | Method for manufacturing semiconductor device | Kenetsu Yokogawa, Kazunori Tsujimoto, Shinichi Tachi | 2004-03-30 |
| 6643893 | Apparatus for cleaning semiconductor wafers in a vacuum environment | Kenetsu Yokogawa, Masaru Izawa, Shinichi Tachi | 2003-11-11 |
| 6629538 | Method for cleaning semiconductor wafers in a vacuum environment | Kenetsu Yokogawa, Masaru Izawa, Shinichi Tachi | 2003-10-07 |
| 6551445 | Plasma processing system and method for manufacturing a semiconductor device by using the same | Ken'etsu Yokogawa, Nobuyuki Negishi, Masaru Izawa, Shinichi Tachi | 2003-04-22 |
| 6475918 | Plasma treatment apparatus and plasma treatment method | Masaru Izawa, Kenetsu Yokogawa, Nobuyuki Negishi, Shinichi Tachi | 2002-11-05 |