Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7071114 | Method and apparatus for dry etching | Takao Kumihashi, Shinichi Tachi | 2006-07-04 |
| 6713401 | Method for manufacturing semiconductor device | Kenetsu Yokogawa, Yoshinori Momonoi, Shinichi Tachi | 2004-03-30 |
| 6562722 | Method and apparatus for dry etching | Takao Kumihashi, Shinichi Tachi | 2003-05-13 |
| 6332425 | Surface treatment method and system | Naoyuki Kofuji, Shin Arai, Tatsumi Mizutani, Keizo Suzuki, Kenichi Mizuishi | 2001-12-25 |
| 6333273 | Method and apparatus for dry etching | Takao Kumihashi, Shinichi Tachi | 2001-12-25 |
| 6231777 | Surface treatment method and system | Naoyuki Kofuji, Shin Arai, Tatsumi Mizutani, Keizo Suzuki, Kenichi Mizuishi | 2001-05-15 |
| 6136721 | Method and apparatus for dry etching | Takao Kumihashi, Shinichi Tachi | 2000-10-24 |
| 6033481 | Plasma processing apparatus | Ken'etsu Yokogawa, Tetsuo Ono, Naoshi Itabashi, Masahito Mori, Shinichi Tachi +1 more | 2000-03-07 |
| 6008133 | Method and apparatus for dry etching | Takao Kumihashi, Shinichi Tachi | 1999-12-28 |
| 5891252 | Plasma processing apparatus | Ken'etsu Yokogawa, Tetsuo Ono, Naoshi Itabashi, Masahito Mori, Shinichi Tachi +1 more | 1999-04-06 |
| 5795832 | Method and apparatus for dry etching | Takao Kumihashi, Shinichi Tachi | 1998-08-18 |
| 5705029 | Dry etching method | Sadayuki Okudaira, Shinichi Tachi | 1998-01-06 |
| 5650038 | Method for dry etching | Takao Kumihashi, Shinichi Tachi | 1997-07-22 |
| 5643473 | Dry etching method | Shinichi Tachi, Sadayuki Okudaira, Kiichiro Mukai | 1997-07-01 |
| 5474650 | Method and apparatus for dry etching | Takao Kumihashi, Shinichi Tachi | 1995-12-12 |
| 5409562 | Dry-etching method and apparatus | Takao Kumihashi, Shinichi Tachi | 1995-04-25 |
| 5368685 | Dry etching apparatus and method | Takao Kumihashi, Shinichi Tachi | 1994-11-29 |
| 5354418 | Method for dry etching | Takao Kumihashi, Shinichi Tachi | 1994-10-11 |
| 5354416 | Dry etching method | Sadayuki Okudaira, Shinichi Tachi | 1994-10-11 |
| 5318667 | Method and apparatus for dry etching | Takao Kumihashi, Shinichi Tachi | 1994-06-07 |
| 5270232 | Process for fabricating field effect transistor | Shinichiro Kimura, Shoji Shukuri, Hiromasa Noda, Digh Hisamoto, Hideyuki Matsuoka +4 more | 1993-12-14 |
| 5242539 | Plasma treatment method and apparatus | Takao Kumihashi, Shinichi Tachi, Masafumi Kanetomo, Junichi Kobayashi, Tatehito Usui +1 more | 1993-09-07 |
| 5147500 | Dry etching method | Shinichi Tachi, Sadayuki Okudaira, Kiichiro Mukai | 1992-09-15 |
| 4992136 | Dry etching method | Shinichi Tachi, Sadayuki Okudaira | 1991-02-12 |
| 4986877 | Method of dry etching | Shinichi Tachi, Sadayuki Okudaira | 1991-01-22 |