Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9240330 | Method of manufacturing a semiconductor integrated circuit device | Yasuhiro Takeda, Hiroshi Yanagita, Takashi Takeuchi, Yasushi Matsuda | 2016-01-19 |
| 7071114 | Method and apparatus for dry etching | Kazunori Tsujimoto, Shinichi Tachi | 2006-07-04 |
| 6599830 | Semiconductor device and manufacturing method thereof | Takeshi Furusawa, Shuntaro Machida | 2003-07-29 |
| 6562722 | Method and apparatus for dry etching | Kazunori Tsujimoto, Shinichi Tachi | 2003-05-13 |
| 6497992 | Process for manufacturing semiconductor integrated circuit device | Takashi Yunogami, Shunji Sasabe, Kazuyuki Suko, Jun Abe, Fumio Murai | 2002-12-24 |
| 6479380 | Semiconductor device and manufacturing method thereof | Takeshi Furusawa, Shuntaro Machida | 2002-11-12 |
| 6333273 | Method and apparatus for dry etching | Kazunori Tsujimoto, Shinichi Tachi | 2001-12-25 |
| 6136721 | Method and apparatus for dry etching | Kazunori Tsujimoto, Shinichi Tachi | 2000-10-24 |
| 6057081 | Process for manufacturing semiconductor integrated circuit device | Takashi Yunogami, Shunji Sasabe, Kazuyuki Suko, Jun Abe, Fumio Murai | 2000-05-02 |
| 6008133 | Method and apparatus for dry etching | Kazunori Tsujimoto, Shinichi Tachi | 1999-12-28 |
| 5795832 | Method and apparatus for dry etching | Kazunori Tsujimoto, Shinichi Tachi | 1998-08-18 |
| 5650038 | Method for dry etching | Kazunori Tsujimoto, Shinichi Tachi | 1997-07-22 |
| 5474650 | Method and apparatus for dry etching | Kazunori Tsujimoto, Shinichi Tachi | 1995-12-12 |
| 5409562 | Dry-etching method and apparatus | Kazunori Tsujimoto, Shinichi Tachi | 1995-04-25 |
| 5368685 | Dry etching apparatus and method | Kazunori Tsujimoto, Shinichi Tachi | 1994-11-29 |
| 5354418 | Method for dry etching | Kazunori Tsujimoto, Shinichi Tachi | 1994-10-11 |
| 5318667 | Method and apparatus for dry etching | Kazunori Tsujimoto, Shinichi Tachi | 1994-06-07 |
| 5242539 | Plasma treatment method and apparatus | Kazunori Tsujimoto, Shinichi Tachi, Masafumi Kanetomo, Junichi Kobayashi, Tatehito Usui +1 more | 1993-09-07 |