Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7737023 | Method of manufacture of semiconductor integrated circuit device and semiconductor integrated circuit device | Shouochi Uno, Atsushi Maekawa, Kazutami Tago, Kazuo Nojiri, Shuntaro Machida +1 more | 2010-06-15 |
| 7419902 | Method of manufacture of semiconductor integrated circuit | Shouochi Uno, Atsushi Maekawa, Kazutami Tago, Kazuo Nojiri, Shuntaro Machida +1 more | 2008-09-02 |
| 7264677 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Sukeyoshi Tsunekawa, Kazuto Watanabe | 2007-09-04 |
| 7025896 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Sukeyoshi Tsunekawa, Kazuto Watanabe | 2006-04-11 |
| 6998325 | Method for manufacturing semiconductor device | Kaori Misawa | 2006-02-14 |
| 6774020 | Semiconductor device and method of manufacturing the same | Shinichi Fukada, Kazuo Nojiri, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2004-08-10 |
| 6756262 | Semiconductor integrated circuit device having spaced-apart electrodes and the method thereof | Yoshitaka Nakamura, Isamu Asano, Satoru Yamada, Tsugio Takahashi, Yuzuru Ohji +2 more | 2004-06-29 |
| 6613242 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Sukeyoshi Tsunekawa, Kazuto Watanabe | 2003-09-02 |
| 6607988 | Manufacturing method of semiconductor integrated circuit device | Yoshitaka Nakamura, Kazuo Nojiri, Sukeyoshi Tsunekawa, Toshiyuki Arai, Miwako Nakahara +3 more | 2003-08-19 |
| 6555464 | Semiconductor device and method of manufacturing the same | Shinichi Fukada, Kazuo Nojiri, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2003-04-29 |
| 6537461 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Sukeyoshi Tsunekawa, Kazuto Watanabe | 2003-03-25 |
| 6528400 | Method of manufacturing a semiconductor device | Shinichi Fukada, Kazuo Nojiri, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2003-03-04 |
| 6506674 | Method of manufacturing a semiconductor integrated circuit device | Takenobu Ikeda, Masahiro Tadokoro, Masaru Izawa | 2003-01-14 |
| 6497992 | Process for manufacturing semiconductor integrated circuit device | Shunji Sasabe, Kazuyuki Suko, Jun Abe, Takao Kumihashi, Fumio Murai | 2002-12-24 |
| 6458602 | Method for fabricating semiconductor integrated circuit device | Kenichi Shoji | 2002-10-01 |
| 6451665 | Method of manufacturing a semiconductor integrated circuit | Kazuo Nojiri, Yuzuru Ohji, Sukeyoshi Tsunekawa, Masahiko Hiratani, Yuichi Matsui | 2002-09-17 |
| 6432835 | Process for fabricating an integrated circuit device having a capacitor with an electrode formed at a high aspect ratio | Kazuo Nojiri | 2002-08-13 |
| 6426255 | Process for making a semiconductor integrated circuit device having a dynamic random access memory | Isamu Asano, Yoshitaka Nakamura, Yuzuru Ohji, Tatsuyuki Saito | 2002-07-30 |
| 6340632 | Method of manufacturing a semiconductor device | Shinichi Fukada, Kazuo Nojiri, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2002-01-22 |
| 6326218 | Semiconductor integrated circuit and its manufacturing method | Kazuo Nojiri, Yuzuru Ohji, Sukeyoshi Tsunekawa, Masahiko Hiratani, Yuichi Matsui | 2001-12-04 |
| 6057081 | Process for manufacturing semiconductor integrated circuit device | Shunji Sasabe, Kazuyuki Suko, Jun Abe, Takao Kumihashi, Fumio Murai | 2000-05-02 |
| 5314839 | Solid state device fabrication method including a surface treatment step with a neutral particle beam with an energy between 10ev and 100ev | Tatsumi Mizutani, Kenetsu Yokokawa, Nobuyoshi Kobayashi | 1994-05-24 |
| 5284544 | Apparatus for and method of surface treatment for microelectronic devices | Tatsumi Mizutani | 1994-02-08 |
| 5241186 | Surface treatment method and apparatus therefor | Tatsumi Mizutani, Keizo Suzuki | 1993-08-31 |
| 5115130 | Surface measuring method and apparatus | Keizo Suzuki, Ken Ninomiya | 1992-05-19 |