Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387235 | Apparatus for the separation and fractionation of differentially expressed gene fragments | Takashi Irie, Hideki Hasegawa, Hideki Kambara | 2002-05-14 |
| 6114695 | Scanning electron microscope and method for dimension measuring by using the same | Hideo Todokoro, Kenji Takamoto, Tadashi Otaka, Fumio Mizuno, Satoru Yamada +3 more | 2000-09-05 |
| 5969357 | Scanning electron microscope and method for dimension measuring by using the same | Hideo Todokoro, Kenji Takamoto, Tadashi Otaka, Fumio Mizuno, Satoru Yamada +3 more | 1999-10-19 |
| 5877498 | Method and apparatus for X-ray analyses | Aritoshi Sugimoto, Yoshimi Sudo, Tokuo Kure, Katsuhiro Kuroda, Takashi Nishida +3 more | 1999-03-02 |
| 5866904 | Scanning electron microscope and method for dimension measuring by using the same | Hideo Todokoro, Kenji Takamoto, Tadashi Otaka, Fumio Mizuno, Satoru Yamada +3 more | 1999-02-02 |
| 5594245 | Scanning electron microscope and method for dimension measuring by using the same | Hideo Todokoro, Kenji Takamoto, Tadashi Otaka, Fumio Mizuno, Satoru Yamada +3 more | 1997-01-14 |
| 5594246 | Method and apparatus for x-ray analyses | Yoshimi Sudo, Tokuo Kure, Katsuhiro Kuroda, Takashi Nishida, Hideo Todokoro +2 more | 1997-01-14 |
| 5481109 | Surface analysis method and apparatus for carrying out the same | Hideo Todokoro, Tokuo Kure, Yasuhiro Mitsui, Katsuhiro Kuroda, Hiroyasu Shichi | 1996-01-02 |
| 5412210 | Scanning electron microscope and method for production of semiconductor device by using the same | Hideo Todokoro, Kenji Takamoto, Tadashi Otaka, Fumio Mizuno, Satoru Yamada +2 more | 1995-05-02 |
| 5220169 | Surface analyzing method and apparatus | Keizo Suzuki, Shigeru Nishimatsu | 1993-06-15 |
| 5138158 | Surface analysis method and apparatus | Shigeru Nishimatsu | 1992-08-11 |
| 5115130 | Surface measuring method and apparatus | Keizo Suzuki, Takashi Yunogami | 1992-05-19 |
| 5108543 | Method of surface treatment | Keizo Suzuki, Shigeru Nishimatsu, Osami Okada | 1992-04-28 |
| 5055679 | Surface analysis method and apparatus | Keizo Suzuki | 1991-10-08 |
| 5028778 | Surface analysis method and a device therefor | Shigeru Nishimatsu | 1991-07-02 |
| 4901667 | Surface treatment apparatus | Keizo Suzuki, Shigeru Nishimatsu, Osami Okada | 1990-02-20 |
| 4844767 | Method of and apparatus for etching | Sadayuki Okudaira, Shigeru Nishimatsi, Keizo Suzuki | 1989-07-04 |
| 4705595 | Method for microwave plasma processing | Sadayuki Okudaira, Shigeru Nishimatsu, Keizo Suzuki, Ryoji Hamazaki | 1987-11-10 |
| 4658143 | Ion source | Katsumi Tokiguchi, Hidemi Koike, Noriyuki Sakudo, Osami Okada, Susumu Ozasa | 1987-04-14 |
| 4624214 | Dry-processing apparatus | Keizo Suzuki, Shigeru Nishimatsu, Sadayuki Okudaira | 1986-11-25 |
| 4579623 | Method and apparatus for surface treatment by plasma | Keizo Suzuki, Shigeru Nishimatsu, Sadayuki Okudaira, Osami Okada | 1986-04-01 |
| 4559100 | Microwave plasma etching apparatus | Shigeru Nishimatsu, Keizo Suzuki, Sadayuki Okudaira, Yoshifumi Ogawa | 1985-12-17 |
| 4522674 | Surface treatment apparatus | Keizo Suzuki, Shigeru Nishimatsu | 1985-06-11 |
| 4481229 | Method for growing silicon-including film by employing plasma deposition | Keizo Suzuki, Atsushi Hiraiwa, Shigeru Takahashi, Shigeru Nishimatsu, Sadayuki Okudaira | 1984-11-06 |
| 4462863 | Microwave plasma etching | Shigeru Nishimatsu, Keizo Suzuki, Ichiro Kanomata, Sadayuki Okudaira, Hiroji Saida | 1984-07-31 |