Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6104025 | Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer | Takayoshi Seki, Kensuke Amemiya, Yasuo Yamashita, Kazuo Mera, Isao Hashimoto +1 more | 2000-08-15 |
| 6043499 | Charge-up prevention method and ion implanting apparatus | Takayoshi Seki | 2000-03-28 |
| 5945681 | Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer | Takayoshi Seki, Kensuke Amemiya, Yasuo Yamashita, Kazuo Mera, Isao Hashimoto +1 more | 1999-08-31 |
| 5925886 | Ion source and an ion implanting apparatus using it | Takayoshi Seki | 1999-07-20 |
| 5729027 | Ion implanter | Takayoshi Seki, Tetsunori Kaji | 1998-03-17 |
| 5506472 | Variable-frequency type radio-frequency quadrupole accelerator including quadrupole cooling means | Junya ITO, Kensuke Amemiya, Noriyuki Sakudo | 1996-04-09 |
| 5349196 | Ion implanting apparatus | Kensuke Amemiya, Yoshimi Hakamata, Noriyuki Sakudo | 1994-09-20 |
| 5086256 | External resonance circuit type radio frequency quadrupole accelerator | Kensuke Amemiya, Noriyuki Sakudo, Takayoshi Seki | 1992-02-04 |
| 5053678 | Microwave ion source | Hidemi Koike, Noriyuki Sakudo, Takayoshi Seki, Kensuke Amemiya | 1991-10-01 |
| 4801847 | Charged particle accelerator using quadrupole electrodes | Noriyuki Sakudo, Hidemi Koike, Osami Okada, Norio Saito, Susumu Ozasa | 1989-01-31 |
| 4658143 | Ion source | Hidemi Koike, Noriyuki Sakudo, Osami Okada, Ken Ninomiya, Susumu Ozasa | 1987-04-14 |
| 4633138 | Ion implanter | Osami Okada, Noriyuki Sakudo, Hidemi Koike | 1986-12-30 |
| 4629930 | Plasma ion source | Noriyuki Sakudo, Osami Okada, Susumu Ozasa, Hidemi Koike, Shunroku Taya +2 more | 1986-12-16 |
| 4543465 | Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase | Noriyuki Sakudo, Katsunobu Abe, Hidemi Koike, Osami Okada | 1985-09-24 |
| 4533831 | Non-mass-analyzed ion implantation | Haruo Itoh, Terunori Warabisako, Tadashi Saitoh, Takashi Tokuyama | 1985-08-06 |
| 4409520 | Microwave discharge ion source | Hidemi Koike, Noriyuki Sakudo, Ichiro Kanomata | 1983-10-11 |
| 4393333 | Microwave plasma ion source | Noriyuki Sakudo, Hidemi Koike, Ichiro Kanomata, Humihiko Nakashima | 1983-07-12 |
| 4316090 | Microwave plasma ion source | Noriyuki Sakudo, Hidemi Koike, Ichiro Kanomata | 1982-02-16 |