Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4839523 | Ion implantation apparatus for semiconductor manufacture | Shunroku Taya, Atsushi Shibata | 1989-06-13 |
| 4543465 | Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase | Noriyuki Sakudo, Katsumi Tokiguchi, Hidemi Koike, Osami Okada | 1985-09-24 |
| 4321538 | Nuclear gyromagnetic resonance apparatus | Satoru Kimura, Norimasa Kamezawa | 1982-03-23 |