Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7557364 | Charge neutralizing device | Hiroyuki Ito, Yuichiro Sasaki, Bunji Mizuno | 2009-07-07 |
| 7166965 | Waveguide and microwave ion source equipped with the waveguide | Hiroyuki Ito | 2007-01-23 |
| 5506472 | Variable-frequency type radio-frequency quadrupole accelerator including quadrupole cooling means | Junya ITO, Katsumi Tokiguchi, Kensuke Amemiya | 1996-04-09 |
| 5349196 | Ion implanting apparatus | Kensuke Amemiya, Yoshimi Hakamata, Katsumi Tokiguchi | 1994-09-20 |
| 5266146 | Microwave-powered plasma-generating apparatus and method | Yasunori Ohno, Takashi Iga, Kenichi Natsui, Isao Hashimoto | 1993-11-30 |
| 5086256 | External resonance circuit type radio frequency quadrupole accelerator | Katsumi Tokiguchi, Kensuke Amemiya, Takayoshi Seki | 1992-02-04 |
| 5053678 | Microwave ion source | Hidemi Koike, Katsumi Tokiguchi, Takayoshi Seki, Kensuke Amemiya | 1991-10-01 |
| 4924101 | Charged particle source | Hifumi Tamura | 1990-05-08 |
| 4801847 | Charged particle accelerator using quadrupole electrodes | Katsumi Tokiguchi, Hidemi Koike, Osami Okada, Norio Saito, Susumu Ozasa | 1989-01-31 |
| 4658143 | Ion source | Katsumi Tokiguchi, Hidemi Koike, Osami Okada, Ken Ninomiya, Susumu Ozasa | 1987-04-14 |
| 4633138 | Ion implanter | Katsumi Tokiguchi, Osami Okada, Hidemi Koike | 1986-12-30 |
| 4629930 | Plasma ion source | Osami Okada, Susumu Ozasa, Katsumi Tokiguchi, Hidemi Koike, Shunroku Taya +2 more | 1986-12-16 |
| 4577396 | Method of forming electrical contact to a semiconductor substrate via a metallic silicide or silicon alloy layer formed in the substrate | Naoki Yamamoto | 1986-03-25 |
| 4543465 | Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase | Katsunobu Abe, Katsumi Tokiguchi, Hidemi Koike, Osami Okada | 1985-09-24 |
| 4433228 | Microwave plasma source | Shigeru Nishimatsu, Keizo Suzuki, Ken Ninomiya, Hidemi Koike, Osami Okada +2 more | 1984-02-21 |
| 4409520 | Microwave discharge ion source | Hidemi Koike, Katsumi Tokiguchi, Ichiro Kanomata | 1983-10-11 |
| 4393333 | Microwave plasma ion source | Katsumi Tokiguchi, Hidemi Koike, Ichiro Kanomata, Humihiko Nakashima | 1983-07-12 |
| 4316090 | Microwave plasma ion source | Katsumi Tokiguchi, Hidemi Koike, Ichiro Kanomata | 1982-02-16 |