Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5266146 | Microwave-powered plasma-generating apparatus and method | Takashi Iga, Noriyuki Sakudo, Kenichi Natsui, Isao Hashimoto | 1993-11-30 |
| 5133825 | Plasma generating apparatus | Yoshimi Hakamata, Ken-ichi Natsui, Yukio Kurosawa, Tadashi Sato, Hiroaki Kojima +1 more | 1992-07-28 |
| 5085755 | Sputtering apparatus for forming thin films | Eiji Setoyama, Mitsuhiro Kamei | 1992-02-04 |
| 5064520 | Method and apparatus for forming a film | Kiyoshi Miyake, Masato Isogai, Yukio Nakagawa, Takayoshi Seki, Koukichi Ouhata +3 more | 1991-11-12 |
| 4847476 | Ion source device | Tadashi Sato, Tomoe Kurosawa, Nobuya Sekimoto, Yoshimi Hakamata, Yukio Kurosawa +1 more | 1989-07-11 |
| 4739169 | Ion source | Yukio Kurosawa, Yoshimi Hakamata, Kunio Hirasawa, Tadashi Sato | 1988-04-19 |
| 4716491 | High frequency plasma generation apparatus | Tomoe Kurosawa, Tadashi Sato, Youichi Ohshita | 1987-12-29 |
| 4713585 | Ion source | Tomoe Kurosawa, Tadashi Sato, Yukio Kurosawa, Yoshimi Hakamata | 1987-12-15 |