| 7821644 |
Apparatus for visual inspection |
Kei Shimura |
2010-10-26 |
| 5999236 |
Active-matrix liquid crystal display unit in which gate and/or data lines are made of Cr containing Ne-atoms |
Katsunori Nakajima, Kenichi Onisawa, Kenichi Chahara |
1999-12-07 |
| 5783055 |
Multi-chamber sputtering apparatus |
Eiji Setoyama, Satoshi Umehara |
1998-07-21 |
| 5429729 |
Sputtering apparatus, device for exchanging target and method for the same |
Eiji Setoyama |
1995-07-04 |
| 5376777 |
Control apparatus and method for a substrate tray on an in-line sputtering apparatus |
Eiji Setoyama |
1994-12-27 |
| 5116482 |
Film forming system using high frequency power and power supply unit for the same |
Eiji Setoyama |
1992-05-26 |
| 5085755 |
Sputtering apparatus for forming thin films |
Eiji Setoyama, Yasunori Ohno |
1992-02-04 |
| 4986890 |
Thin film deposition system |
Eiji Setoyama |
1991-01-22 |
| 4911815 |
Sputtering apparatus for production of thin films of magnetic materials |
Eiji Setoyama, Shinzou Oikawa |
1990-03-27 |
| 4865709 |
Magnetron sputter apparatus and method for forming films by using the same apparatus |
Yukio Nakagawa, Ken-ichi Natsui, Youichi Ohshita, Tadashi Sato, Eiji Setoyama |
1989-09-12 |