Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5061356 | Vacuum treatment apparatus and vacuum treatment method | Shigeru Tanaka, Eiji Setoyama, Sigeki Yamamura | 1991-10-29 |
| 4911815 | Sputtering apparatus for production of thin films of magnetic materials | Mitsuhiro Kamei, Eiji Setoyama | 1990-03-27 |