Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5061356 | Vacuum treatment apparatus and vacuum treatment method | Shigeru Tanaka, Eiji Setoyama, Shinzou Oikawa | 1991-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5061356 | Vacuum treatment apparatus and vacuum treatment method | Shigeru Tanaka, Eiji Setoyama, Shinzou Oikawa | 1991-10-29 |