| 7485874 |
Apparatus for manufacturing semiconductor substrates |
Seiichi Nakamura, Hideki Nishihata, Riyuusuke Kasamatsu, Kazunori Tsubuku, Akira Bando +4 more |
2009-02-03 |
| 6667485 |
Ion implanting apparatus and sample processing apparatus |
Hiroyuki Tomita |
2003-12-23 |
| 6614190 |
Ion implanter |
Hiroyuki Tomita, Isao Hashimoto, Yasunori Nakano, Takayoshi Seki |
2003-09-02 |
| 6570171 |
Ion implanter |
Hiroyuki Tomita |
2003-05-27 |
| 6501080 |
Ion implanting apparatus and sample processing apparatus |
Hiroyuki Tomita |
2002-12-31 |
| 6429442 |
Ion implanter |
Hiroyuki Tomita |
2002-08-06 |
| 6403969 |
Ion implantation system and ion implantation method |
Hiroyuki Tomita |
2002-06-11 |
| 6362490 |
Ion implanter |
Hiroyuki Tomita |
2002-03-26 |
| 6104025 |
Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer |
Katsumi Tokiguchi, Takayoshi Seki, Kensuke Amemiya, Yasuo Yamashita, Isao Hashimoto +1 more |
2000-08-15 |
| 5945681 |
Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer |
Katsumi Tokiguchi, Takayoshi Seki, Kensuke Amemiya, Yasuo Yamashita, Isao Hashimoto +1 more |
1999-08-31 |
| 5932883 |
Ion implanter for implanting ion on wafer with low contamination |
Isao Hashimoto |
1999-08-03 |
| 5753923 |
Ion injection device and method therefor |
Isao Hashimoto, Yasuo Yamashita, Minoru Fujimoto, Kouji Ishiguro |
1998-05-19 |
| 5229569 |
Laser machining apparatus and method of the same |
Tateoki Miyauchi, Shigenobu Maruyama, Katsurou Mizukoshi, Mikio Hongo, Koyo Morita +3 more |
1993-07-20 |
| 5157235 |
Laser marking system |
Kiyoshi Okumura, Kazuhiko Nishimura, Minoru Fujimoto, Hiroo Ohkawa, Shigeo Shiono |
1992-10-20 |
| 5045679 |
Optical path adjusting system with dual-axis wedge prisms |
Minoru Suzuki |
1991-09-03 |