Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9596746 | Charged particle beam generator, charged particle irradiation system, method for operating charged particle beam generator and method for operating charged particle irradiation system | Masumi Umezawa, Takashi Iga, Kouji Tobinaga | 2017-03-14 |
| 7485874 | Apparatus for manufacturing semiconductor substrates | Seiichi Nakamura, Hideki Nishihata, Riyuusuke Kasamatsu, Akira Bando, Nobuo Tsumaki +4 more | 2009-02-03 |