Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7485874 | Apparatus for manufacturing semiconductor substrates | Seiichi Nakamura, Hideki Nishihata, Riyuusuke Kasamatsu, Kazunori Tsubuku, Akira Bando +4 more | 2009-02-03 |
| 6618692 | Remote diagnostic system and method for semiconductor manufacturing equipment | Kazue Takahashi, Hideyuki Yamamoto | 2003-09-09 |
| 6288368 | Vacuum heating furnace with tapered portion | Hiroki Kawada, Tomoji Watanabe, Toshimitsu Miyata | 2001-09-11 |
| 6186153 | Plasma treatment method and manufacturing method of semiconductor device | Hiroyuki Kitsunai, Shigeru Kakuta, Kazuo Nojiri, Kazue Takahashi | 2001-02-13 |
| 6093911 | Vacuum heating furnace with tapered portion | Hiroki Kawada, Tomoji Watanabe, Toshimitsu Miyata | 2000-07-25 |
| 5258047 | Holder device and semiconductor producing apparatus having same | Hiromitsu Tokisue, Hiroyuki Kitsunai, Hiroshi Inouye | 1993-11-02 |
| 5080195 | Method of supplying lubricant and apparatus for the same | Muneo Mizumoto, Koji Kato, Hiroshi Inoue | 1992-01-14 |
| 4874273 | Apparatus for holding and/or conveying articles by fluid | Hiromitsu Tokisue, Toshifumi Koike | 1989-10-17 |
| 4630942 | Guiding apparatus | Hiromitsu Tokisue, Hiroshi Inoue | 1986-12-23 |
| 4602873 | Vibration-controlling bearing | Hideki Izumi, Kazuo Ihara | 1986-07-29 |
| 4593835 | Cryogenic liquefied pump system | Seiichi Kikkawa, Hisanao Ogata, Yoshinori Hakuraku, Masahiro Mase, Yoshihisa Awada +1 more | 1986-06-10 |
| 4579508 | Turbomolecular pump | Shinjiro Ueda, Kousuke Noda, Hideki Izumi, Osami Matsushita, Takeshi Okawada | 1986-04-01 |