| 5961291 |
Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to scrape deposits from the inside of the pump |
Seiji Sakagami, Chiaki Urano, Shinji Koyano, Yuichi Kinoshita, Takashi Nagaoka |
1999-10-05 |
| 5664935 |
Vacuum pump |
Akira Nishiuchi, Noboru Matsumura, Katsuaki Kikuchi, Takashi Nagaoka |
1997-09-09 |
| 5536148 |
Turbo vacuum pump |
Akira Nishiuchi, Noboru Matsumura, Katsuaki Kikuchi, Takashi Nagaoka, Seiji Sakagami |
1996-07-16 |
| 5451147 |
Turbo vacuum pump |
Seiji Sakagami, Shinjiro Ueda, Takashi Nagaoka |
1995-09-19 |
| 5190438 |
Vacuum pump |
Minoru Taniyama, Kazuaki Nakamori, Takashi Nagaoka |
1993-03-02 |
| 5062771 |
Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber |
Akihiko Satou, Tadao Kusaka, Shigeo Tomiyama, Kouzi Aoki, Ichiro Gyobu +4 more |
1991-11-05 |
| 5020969 |
Turbo vacuum pump |
Seiji Sakagami, Takeshi Okawada, Shinjiroo Ueda, Yoshihisa Awada, Takashi Nagaoka |
1991-06-04 |
| 4904155 |
Vacuum pump |
Takashi Nagaoka, Ichiro Gyobu, Kimio Muramatsu, Keiji Ueyama, Yoshihisa Awada +1 more |
1990-02-27 |
| 4835114 |
Method for LPCVD of semiconductors using oil free vacuum pumps |
Akihiko Satou, Tadao Kusaka, Shigeo Tomiyama, Kouzi Aoki, Ichiro Gyobu +4 more |
1989-05-30 |
| 4735550 |
Turbo molecular pump |
Takeshi Okawada, Shinjiro Ueda, Susumu Yamazaki, Nobukatsu Arai, Kazuaki Nakamori |
1988-04-05 |
| 4734018 |
Vacuum pump with plural labyrinth seal portions |
Minoru Taniyama, Takashi Nagaoka |
1988-03-29 |
| 4668160 |
Vacuum pump |
Takashi Nagaoka, Yoshitsugu Tsutsumi, Minoru Taniyama, Makoto Terajima |
1987-05-26 |
| 4593835 |
Cryogenic liquefied pump system |
Seiichi Kikkawa, Hisanao Ogata, Yoshinori Hakuraku, Nobuo Tsumaki, Yoshihisa Awada +1 more |
1986-06-10 |