Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6628817 | Inspection data analyzing system | Seiji Ishikawa, Masao Sakata, Jun Nakazato, Sadao Shimoyashiro, Hiroto Nagatomo +10 more | 2003-09-30 |
| 6529619 | Inspection data analyzing system | Seiji Ishikawa, Masao Sakata, Jun Nakazato, Sadao Shimoyashiro, Hiroto Nagatomo +10 more | 2003-03-04 |
| 6339653 | Inspection data analyzing system | Seiji Ishikawa, Masao Sakata, Jun Nakazato, Sadao Shimoyashiro, Hiroto Nagatomo +10 more | 2002-01-15 |
| 6330352 | Inspection data analyzing system | Seiji Ishikawa, Masao Sakata, Jun Nakazato, Sadao Shimoyashiro, Hiroto Nagatomo +10 more | 2001-12-11 |
| 6185322 | Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device | Seiji Ishikawa, Masao Sakata, Jun Nakazato, Sadao Shimoyashiro, Hiroto Nagatomo +10 more | 2001-02-06 |
| 5841893 | Inspection data analyzing system | Seiji Ishikawa, Masao Sakata, Jun Nakazato, Sadao Shimoyashiro, Hiroto Nagatomo +10 more | 1998-11-24 |
| 5062771 | Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber | Akihiko Satou, Tadao Kusaka, Shigeo Tomiyama, Kouzi Aoki, Ichiro Gyobu +4 more | 1991-11-05 |
| 4904155 | Vacuum pump | Takashi Nagaoka, Ichiro Gyobu, Keiji Ueyama, Masahiro Mase, Yoshihisa Awada +1 more | 1990-02-27 |
| 4835114 | Method for LPCVD of semiconductors using oil free vacuum pumps | Akihiko Satou, Tadao Kusaka, Shigeo Tomiyama, Kouzi Aoki, Ichiro Gyobu +4 more | 1989-05-30 |