Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5062771 | Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber | Akihiko Satou, Tadao Kusaka, Shigeo Tomiyama, Kouzi Aoki, Kimio Muramatsu +4 more | 1991-11-05 |
| 4904155 | Vacuum pump | Takashi Nagaoka, Kimio Muramatsu, Keiji Ueyama, Masahiro Mase, Yoshihisa Awada +1 more | 1990-02-27 |
| 4835114 | Method for LPCVD of semiconductors using oil free vacuum pumps | Akihiko Satou, Tadao Kusaka, Shigeo Tomiyama, Kouzi Aoki, Kimio Muramatsu +4 more | 1989-05-30 |
| 4354802 | Vaned diffuser | Hideo Nishida, Fumio Koseki | 1982-10-19 |