Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5062771 | Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber | Akihiko Satou, Tadao Kusaka, Kouzi Aoki, Ichiro Gyobu, Kimio Muramatsu +4 more | 1991-11-05 |
| 4835114 | Method for LPCVD of semiconductors using oil free vacuum pumps | Akihiko Satou, Tadao Kusaka, Kouzi Aoki, Ichiro Gyobu, Kimio Muramatsu +4 more | 1989-05-30 |