Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4971651 | Microwave plasma processing method and apparatus | Seiichi Watanabe, Makoto Nawata, Ryooji Fukuyama, Yutaka Kakehi, Saburo Kanai | 1990-11-20 |
| 4904155 | Vacuum pump | Takashi Nagaoka, Ichiro Gyobu, Kimio Muramatsu, Masahiro Mase, Yoshihisa Awada +1 more | 1990-02-27 |