| 7396481 |
Etching method of organic insulating film |
Michinobu Mizumura, Yutaka Ohmoto, Katsuya Watanabe |
2008-07-08 |
| 7132293 |
Method and apparatus for processing samples |
Yoshimi Torii, Kazuo Nojiri, Yoshinao Kawasaki, Yoshiaki Sato, Hironobu Kawahara |
2006-11-07 |
| 7014787 |
Etching method of organic insulating film |
Michinobu Mizumura, Yutaka Ohmoto, Katsuya Watanabe |
2006-03-21 |
| 6989228 |
Method and apparatus for processing samples |
Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more |
2006-01-24 |
| 6793833 |
Etching method of organic insulating film |
Michinobu Mizumura, Yutaka Ohmoto, Katsuya Watanabe |
2004-09-21 |
| 6656846 |
Apparatus for processing samples |
Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +4 more |
2003-12-02 |
| 6537417 |
Apparatus for processing samples |
Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more |
2003-03-25 |
| 6537415 |
Apparatus for processing samples |
Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more |
2003-03-25 |
| 6328845 |
Plasma-processing method and an apparatus for carrying out the same |
Yutaka Ohmoto, Makoto Nawata |
2001-12-11 |
| 6329298 |
Apparatus for treating samples |
Makoto Nawata, Yutaka Kakehi, Hironobu Kawahara, Yoshiaki Sato, Yoshimi Torii +2 more |
2001-12-11 |
| 6254721 |
Method and apparatus for processing samples |
Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more |
2001-07-03 |
| 6165377 |
Plasma etching method and apparatus |
Hironobu Kawahara, Yoshinao Kawasaki, Yoshiaki Sato |
2000-12-26 |
| 6077788 |
Method and apparatus for processing samples |
Yoshinao Kawasaki, Hironobu Kawahara, Yoshiaki Sato, Kazuo Nojiri, Yoshimi Torii |
2000-06-20 |
| 6036816 |
Apparatus for processing a sample having a metal laminate |
Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more |
2000-03-14 |
| 5952245 |
Method for processing samples |
Yoshimi Torii, Kazuo Nojiri, Yoshinao Kawasaki, Yoshiaki Sato, Hironobu Kawahara |
1999-09-14 |
| 5900162 |
Plasma etching method and apparatus |
Hironobu Kawahara, Yoshinao Kawasaki, Yoshiaki Sato |
1999-05-04 |
| 5868854 |
Method and apparatus for processing samples |
Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more |
1999-02-09 |
| 5770100 |
Method of treating samples |
Makoto Nawata, Yutaka Kakehi, Hironobu Kawahara, Yoshiaki Sato, Yoshimi Torii +2 more |
1998-06-23 |
| 5556714 |
Method of treating samples |
Makoto Nawata, Yutaka Kakehi, Hironobu Kawahara, Yoshiaki Sato, Yoshimi Torii +2 more |
1996-09-17 |
| 5380397 |
Method of treating samples |
Makoto Nawata, Yutaka Kakehi, Hironobu Kawahara, Yoshiaki Sato, Yoshimi Torii +2 more |
1995-01-10 |
| 5276386 |
Microwave plasma generating method and apparatus |
Seiichi Watanabe, Makoto Nawata, Yutaka Kakehi, Saburo Kanai, Yoshinao Kawasaki |
1994-01-04 |
| 5200017 |
Sample processing method and apparatus |
Yoshinao Kawasaki, Hironobu Kawahara, Yoshiaki Sato, Kazuo Nojiri, Yoshimi Torii |
1993-04-06 |
| 5007981 |
Method of removing residual corrosive compounds by plasma etching followed by washing |
Yoshinao Kawasaki, Hironobu Kawahara, Yoshiaki Sato, Kazuo Nojiri, Yoshimi Torii |
1991-04-16 |
| 4971651 |
Microwave plasma processing method and apparatus |
Seiichi Watanabe, Makoto Nawata, Yutaka Kakehi, Saburo Kanai, Keiji Ueyama |
1990-11-20 |