Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7608162 | Plasma processing apparatus and method | Yutaka Ohmoto, Ken Yoshioka, Kazue Takahashi, Saburou Kanai | 2009-10-27 |
| 7354525 | Specimen surface processing apparatus and surface processing method | Masatoshi Oyama, Yoshiyuki Ohta, Tsuyoshi Yoshida | 2008-04-08 |
| 7288166 | Plasma processing apparatus | Yutaka Ohmoto, Ken Yoshioka, Kazue Takahashi, Saburou Kanai | 2007-10-30 |
| 7132293 | Method and apparatus for processing samples | Yoshimi Torii, Kazuo Nojiri, Yoshinao Kawasaki, Yoshiaki Sato, Ryooji Fukuyama | 2006-11-07 |
| 6989228 | Method and apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2006-01-24 |
| 6867144 | Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Ken Yoshioka, Kazue Takahashi, Saburou Kanai | 2005-03-15 |
| 6759338 | Plasma processing apparatus and method | Yutaka Ohmoto, Ken Yoshioka, Kazue Takahashi, Saburou Kanai | 2004-07-06 |
| 6755935 | Plasma processing apparatus | Hideyuki Kazumi, Ichiro Sasaki, Kenji Maeda, Tsutomu Tetsuka | 2004-06-29 |
| 6677167 | Wafer processing apparatus and a wafer stage and a wafer processing method | Seiichiro Kanno, Mitsuru Suehiro, Saburou Kanai, Toshio Masuda | 2004-01-13 |
| 6656846 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +4 more | 2003-12-02 |
| 6649021 | Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Ken Yoshioka, Kazue Takahashi, Saburou Kanai | 2003-11-18 |
| 6624084 | Plasma processing equipment and plasma processing method using the same | Kenji Maeda, Yutaka Omoto, Ichiro Sasaki | 2003-09-23 |
| 6558100 | Vacuum processing apparatus and a vacuum processing system | Mitsuru Suehiro, Kazue Takahashi, Hideyuki Yamamoto, Katsuya Watanabe | 2003-05-06 |
| 6549393 | Semiconductor wafer processing apparatus and method | Seiichiro Kanno, Mitsuru Suehiro, Saburo Kanai, Ken Yoshioka | 2003-04-15 |
| 6537415 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2003-03-25 |
| 6537417 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2003-03-25 |
| 6537012 | Vacuum processing apparatus and a vacuum processing system | Mitsuru Suehiro, Kazue Takahashi, Hideyuki Yamamoto, Katsuya Watanabe | 2003-03-25 |
| 6427621 | Plasma processing device and plasma processing method | Masato Ikegawa, Tsutomu Tetsuka, Ichiro Sasaki, Tatehito Usui | 2002-08-06 |
| 6413876 | Method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Ken Yoshioka, Kazue Takahashi, Saburou Kanai | 2002-07-02 |
| 6388624 | Parallel-planar plasma processing apparatus | Hideyuki Kazumi | 2002-05-14 |
| 6329298 | Apparatus for treating samples | Ryooji Fukuyama, Makoto Nawata, Yutaka Kakehi, Yoshiaki Sato, Yoshimi Torii +2 more | 2001-12-11 |
| 6254721 | Method and apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2001-07-03 |
| 6235146 | Vacuum treatment system and its stage | Masanori Kadotani, Saburo Kanai, Youichi Itou, Takashi Fujii, Ryouji Hamasaki +2 more | 2001-05-22 |
| 6165377 | Plasma etching method and apparatus | Yoshinao Kawasaki, Yoshiaki Sato, Ryooji Fukuyama | 2000-12-26 |
| 6077788 | Method and apparatus for processing samples | Yoshinao Kawasaki, Yoshiaki Sato, Ryooji Fukuyama, Kazuo Nojiri, Yoshimi Torii | 2000-06-20 |