Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051560 | Ion gun and ion milling machine | Kengo Asai, Hisayuki Takasu, Toru Iwaya | 2024-07-30 |
| 10796884 | Plasma processing apparatus | Makoto Satake, Tadayoshi Kawaguchi | 2020-10-06 |
| 10229813 | Plasma processing apparatus with lattice-like faraday shields | Tadayoshi Kawaguchi, Ryoji Nishio | 2019-03-12 |
| 10217613 | Plasma processing apparatus | Tetsuo Kawanabe, Takumi Tandou, Naoki Yasui | 2019-02-26 |
| 9097754 | Method of manufacturing magnetoresistive element | Makoto Satake, Jun Hayakawa, Takeshi Shimada, Naohiro Yamamoto, Atsushi Yoshida | 2015-08-04 |
| 8926790 | Plasma processing apparatus | Toshio Masuda, Naoshi Itabashi, Masanori Kadotani, Takashi Fujii | 2015-01-06 |
| 8425786 | Plasma etching method and plasma etching apparatus | Makoto Satake, Kenji Maeda, Kenetsu Yokogawa, Tatehito Usui, Ryoji Nishio | 2013-04-23 |
| 8282767 | Plasma processing apparatus | Naoshi Itabashi, Seiichiro Kanno, Motohiko Yoshigai | 2012-10-09 |
| 8024831 | Cleaning method | Kazuyuki Ikenaga, Muneo Furuse | 2011-09-27 |
| 8006340 | Cleaning apparatus | Kazuyuki Ikenaga, Muneo Furuse | 2011-08-30 |
| 7931776 | Plasma processing apparatus | Naoshi Itabashi, Seiichiro Kanno, Motohiko Yoshigai | 2011-04-26 |
| 7908104 | Plasma processing apparatus and method for detecting status of said apparatus | Naoshi Itabashi, Atsushi Itou | 2011-03-15 |
| 7771607 | Plasma processing apparatus and plasma processing method | Kazuyuki Ikenaga, Tetsuo Ono, Motohiko Yoshigai, Naoshi Itabashi | 2010-08-10 |
| 7601241 | Plasma processing apparatus and plasma processing method | Kazuyuki Ikenaga, Tetsuo Ono, Motohiko Yoshigai, Naoshi Itabashi | 2009-10-13 |
| 6899766 | Diagnosis method for semiconductor processing apparatus | Go Miya, Junichi Tanaka, Hideyuki Yamamoto | 2005-05-31 |
| 6866744 | Semiconductor processing apparatus and a diagnosis method therefor | Go Miya, Junichi Tanaka, Hideyuki Yamamoto | 2005-03-15 |
| 6846363 | Plasma processing apparatus and method | Hideyuki Kazumi, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2005-01-25 |
| 6833051 | Plasma processing apparatus and method | Hideyuki Kazumi, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2004-12-21 |
| 6755935 | Plasma processing apparatus | Hideyuki Kazumi, Ichiro Sasaki, Kenji Maeda, Hironobu Kawahara | 2004-06-29 |
| 6756737 | Plasma processing apparatus and method | Akira Doi, Ken Yoshioka, Manabu Edamura, Hideyuki Kazumi, Saburou Kanai +3 more | 2004-06-29 |
| 6716301 | Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe | Seiichiro Kanno, Ryoji Nishio, Junichi Tanaka, Hideyuki Yamamoto, Kazuyuki Ikenaga +1 more | 2004-04-06 |
| 6499424 | Plasma processing apparatus and method | Hideyuki Kazumi, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2002-12-31 |
| 6481370 | Plasma processsing apparatus | Hideyuki Kazumi, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2002-11-19 |
| 6427621 | Plasma processing device and plasma processing method | Masato Ikegawa, Ichiro Sasaki, Tatehito Usui, Hironobu Kawahara | 2002-08-06 |
| 6388382 | Plasma processing apparatus and method | Akira Doi, Ken Yoshioka, Manabu Edamura, Hideyuki Kazumi, Saburou Kanai +3 more | 2002-05-14 |