Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8569177 | Plasma processing apparatus and plasma processing method | Tomohiro Ohashi, Akitaka Makino, Hiroho Kitada, Tomoyuki Tamura | 2013-10-29 |
| 8197704 | Plasma processing apparatus and method for operating the same | Takahisa Hashimoto, Hideki Kihara | 2012-06-12 |
| 8024831 | Cleaning method | Kazuyuki Ikenaga, Tsutomu Tetsuka | 2011-09-27 |
| 8006340 | Cleaning apparatus | Kazuyuki Ikenaga, Tsutomu Tetsuka | 2011-08-30 |
| 7526948 | Device and method for detecting foreign material on the surface of plasma processing apparatus | Hideyuki Yamamoto, Hiromichi Enami | 2009-05-05 |
| 7052731 | Plasma processing apparatus, protecting layer therefor and installation of protecting layer | Kunihiko Koroyasu, Tomoyuki Tamura | 2006-05-30 |
| 6914005 | Plasma etching method | Mitsuru Suehiro, Hiroshi Kanekiyo, Kunihiko Koroyasu, Tomoyuki Tamura | 2005-07-05 |
| 6875477 | Method for coating internal surface of plasma processing chamber | Douglas M. Trickett | 2005-04-05 |
| 6837937 | Plasma processing apparatus | Susumu Tauchi, Masanori Kadotani, Motohiko Yoshigai | 2005-01-04 |
| 6796269 | Apparatus and method for monitoring plasma processing apparatus | Ichiro Sasaki, Toshio Masuda, Hideyuki Yamamoto | 2004-09-28 |
| 6158383 | Plasma processing method and apparatus | Seiichi Watanabe, Hitoshi Tamura, Toru Otsubo | 2000-12-12 |
| 5886473 | Surface wave plasma processing apparatus | Seiichi Watanabe, Masahiro Sumiya, Hitoshi Tamura | 1999-03-23 |
| 5804033 | Microwave plasma processing method and apparatus | Saburo Kanai, Yoshinao Kawasaki, Kazuaki Ichihashi, Seiichi Watanabe, Makoto Nawata +1 more | 1998-09-08 |