Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11955360 | Electrostatic chuck and processing apparatus | Takeshi Takabatake, Tomohiro NAKASUJI, Akira Itoh, Kentaro Seto, Yutaka Omoto +1 more | 2024-04-09 |
| 11482435 | Plasma processing apparatus | Masatoshi KAWAKAMI, Tsutomu Nakamura, Hideki Kihara, Hidenobu Tanimura, Hironori Kusumoto | 2022-10-25 |
| 8897906 | Wafer processing based on sensor detection and system learning | Tomohiro Ohashi, Akitaka Makino, Hideki Kihara | 2014-11-25 |
| 8828257 | Plasma processing apparatus and operation method thereof | Kazunori Nakamoto, Yosuke Sakai | 2014-09-09 |
| 8569177 | Plasma processing apparatus and plasma processing method | Tomohiro Ohashi, Akitaka Makino, Muneo Furuse, Tomoyuki Tamura | 2013-10-29 |