Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1005245 | Electrode cover for a plasma processing apparatus | Shintarou Nakatani, Takamasa Ichino, Yuki Tanaka | 2023-11-21 |
| 11424106 | Plasma processing apparatus | Yuki Kondo, Kenetsu Yokogawa, Masahito Mori, Satoshi Une | 2022-08-23 |
| 11315759 | Plasma processing apparatus | Takamasa Ichino, Kohei Sato | 2022-04-26 |
| 10796890 | Plasma processing apparatus and sample stage thereof | Hironori Kusumoto, Yutaka Ohmoto, Koji Nagai | 2020-10-06 |
| 10763088 | Vacuum processing apparatus | Takashi Uemura, Takamasa Ichino, Kohei Sato | 2020-09-01 |
| D840364 | Electrode cover for a plasma processing apparatus | Takamasa Ichino, Kohei Sato | 2019-02-12 |
| D840365 | Cover ring for a plasma processing apparatus | Takamasa Ichino, Kohei Sato | 2019-02-12 |
| D836573 | Ring for a plasma processing apparatus | Takamasa Ichino, Kohei Sato | 2018-12-25 |
| 10141165 | Plasma processing apparatus and sample stage thereof | Hironori Kusumoto, Yutaka Ohmoto, Koji Nagai | 2018-11-27 |
| D827592 | Electrode cover for a plasma processing apparatus | Takamasa Ichino, Kohei Sato | 2018-09-04 |
| 9384946 | Plasma processing apparatus | Kohei Sato, Yutaka Ohmoto | 2016-07-05 |
| 9343336 | Plasma processing apparatus and plasma processing method | Kohei Sato, Yutaka Omoto | 2016-05-17 |
| 8920665 | Plasma processing apparatus and plasma processing method | Kohei Sato, Yutaka Omoto | 2014-12-30 |
| 8828257 | Plasma processing apparatus and operation method thereof | Hiroho Kitada, Yosuke Sakai | 2014-09-09 |