Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334316 | Plasma processing apparatus and plasma processing method | Kohei Sato | 2025-06-17 |
| 12224157 | Plasma processing apparatus and plasma processing method | Yuki Tanaka, Shintarou Nakatani, Ryusuke Eijima | 2025-02-11 |
| D1005245 | Electrode cover for a plasma processing apparatus | Shintarou Nakatani, Kazunori Nakamoto, Yuki Tanaka | 2023-11-21 |
| 11315759 | Plasma processing apparatus | Kohei Sato, Kazunori Nakamoto | 2022-04-26 |
| 11094509 | Plasma processing apparatus | Makoto Satake, Kenetsu Yokogawa, Tadayoshi Kawaguchi | 2021-08-17 |
| 10763088 | Vacuum processing apparatus | Takashi Uemura, Kazunori Nakamoto, Kohei Sato | 2020-09-01 |
| 10741368 | Plasma processing apparatus | Takumi Tandou, Kenetsu Yokogawa | 2020-08-11 |
| 10692784 | Vacuum processing apparatus | Kohei Sato | 2020-06-23 |
| D840365 | Cover ring for a plasma processing apparatus | Kohei Sato, Kazunori Nakamoto | 2019-02-12 |
| D840364 | Electrode cover for a plasma processing apparatus | Kohei Sato, Kazunori Nakamoto | 2019-02-12 |
| D836573 | Ring for a plasma processing apparatus | Kohei Sato, Kazunori Nakamoto | 2018-12-25 |
| D827592 | Electrode cover for a plasma processing apparatus | Kohei Sato, Kazunori Nakamoto | 2018-09-04 |
| 9887070 | Plasma processing apparatus and plasma processing method | Takao Arase, Masahito Mori, Kenetsu Yokogawa, Yuusuke Takegawa | 2018-02-06 |
| 9779919 | Plasma processing apparatus and plasma processing method | Takao Arase, Masahito Mori, Kenetsu Yokogawa, Yuusuke Takegawa | 2017-10-03 |
| 9566821 | Plasma processing apparatus and plasma processing method | Ryoji Nishio, Shinji Obama | 2017-02-14 |
| 8329054 | Plasma processing apparatus and plasma processing method | Ryoji Nishio, Shinji Obama | 2012-12-11 |
| 8186300 | Plasma processing apparatus | Ryoji Nishio, Tomoyuki Tamura, Shinji Obama | 2012-05-29 |