Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9566821 | Plasma processing apparatus and plasma processing method | Takamasa Ichino, Ryoji Nishio | 2017-02-14 |
| 8731706 | Vacuum processing apparatus | Shingo Kimura, Shouji Okiguchi, Akira Kagoshima | 2014-05-20 |
| 8329054 | Plasma processing apparatus and plasma processing method | Takamasa Ichino, Ryoji Nishio | 2012-12-11 |
| 8186300 | Plasma processing apparatus | Takamasa Ichino, Ryoji Nishio, Tomoyuki Tamura | 2012-05-29 |