Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11961719 | Vacuum processing method | Nozomu YOSHIOKA, Kazumasa Okuma | 2024-04-16 |
| 11532484 | Plasma processing apparatus and plasma processing method | Taku Iwase, Satoshi Terakura, Hayato Watanabe, Masahito Mori | 2022-12-20 |
| 11355322 | Plasma processing apparatus and plasma processing method | Taku Iwase, Masahito Mori, Kenetsu Yokogawa | 2022-06-07 |
| 11257678 | Plasma processing method | Tomohiro Takamatsu, Hiroyuki Kajifusa | 2022-02-22 |
| D891636 | Ring for a plasma processing apparatus | Masakazu Isozaki, Masahito Mori, Kenetsu Yokogawa, Taku Iwase | 2020-07-28 |
| 10665448 | Plasma processing apparatus | Ken'etsu Yokogawa, Masahito Mori | 2020-05-26 |
| D871609 | Electrode plate peripheral ring for a plasma processing apparatus | Masakazu Isozaki, Masahito Mori, Kenetsu Yokogawa, Takahisa Hashimoto | 2019-12-31 |
| D870314 | Electrode cover for a plasma processing apparatus | Masakazu Isozaki, Masahito Mori, Kenetsu Yokogawa, Yousuke Sakai | 2019-12-17 |
| D868993 | Electrode plate for a plasma processing apparatus | Masakazu Isozaki, Masahito Mori, Kenetsu Yokogawa, Takahisa Hashimoto | 2019-12-03 |
| 10332760 | Method for controlling plasma processing apparatus | Masahito Mori, Akira Hirata, Koichi Yamamoto | 2019-06-25 |
| 10157750 | Plasma processing method and plasma processing apparatus | Satoshi Terakura, Masahito Mori, Taku Iwase | 2018-12-18 |
| 10056236 | Plasma processing method | Hayato Watanabe, Masahito Mori, Taku Iwase | 2018-08-21 |
| 9905431 | Dry etching method | Satoshi Terakura, Masahito Mori, Ryuta Machida | 2018-02-27 |
| 9887070 | Plasma processing apparatus and plasma processing method | Masahito Mori, Kenetsu Yokogawa, Yuusuke Takegawa, Takamasa Ichino | 2018-02-06 |
| 9779919 | Plasma processing apparatus and plasma processing method | Masahito Mori, Kenetsu Yokogawa, Yuusuke Takegawa, Takamasa Ichino | 2017-10-03 |
| 9230782 | Plasma processing method and apparatus | Eiji Ikegami, Shoji Ikuhara, Takeshi Shimada, Kenichi Kuwabara, Tsuyoshi Matsumoto | 2016-01-05 |
| 9136095 | Method for controlling plasma processing apparatus | Masahito Mori, Akira Hirata, Koichi Yamamoto | 2015-09-15 |
| 8900401 | Plasma processing method and apparatus | Eiji Ikegami, Shoji Ikuhara, Takeshi Shimada, Kenichi Kuwabara, Tsuyoshi Matsumoto | 2014-12-02 |
| 8038896 | Plasma processing method and apparatus | Eiji Ikegami, Shoji Ikuhara, Takeshi Shimada, Kenichi Kuwabara, Tsuyoshi Matsumoto | 2011-10-18 |
| 7364956 | Method for manufacturing semiconductor devices | Go Saito, Toshiaki Nishida, Takahiro Shimomura | 2008-04-29 |
| 7098138 | Plasma processing method for working the surface of semiconductor devices | Motohiko Yoshigai, Go Saito, Masamichi Sakaguchi, Hiroaki Ishimura, Takahiro Shimomura | 2006-08-29 |
| 6617255 | Plasma processing method for working the surface of semiconductor devices | Motohiko Yoshigai, Go Saito, Masamichi Sakaguchi, Hiroaki Ishimura, Takahiro Shimomura | 2003-09-09 |