Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262840 | Plasma processing apparatus | Akira Kagoshima, Daisuke Shiraishi, Satomi Inoue, Shigeru Nakamoto, Toshihiro Morisawa | 2019-04-16 |
| 9230782 | Plasma processing method and apparatus | Eiji Ikegami, Takeshi Shimada, Kenichi Kuwabara, Takao Arase, Tsuyoshi Matsumoto | 2016-01-05 |
| 8992721 | Plasma processing apparatus | Akira Kagoshima, Daisuke Shiraishi, Satomi Inoue, Shigeru Nakamoto, Toshihiro Morisawa | 2015-03-31 |
| 8900401 | Plasma processing method and apparatus | Eiji Ikegami, Takeshi Shimada, Kenichi Kuwabara, Takao Arase, Tsuyoshi Matsumoto | 2014-12-02 |
| 8282849 | Etching process state judgment method and system therefor | Toshihiro Morisawa, Akira Kagoshima, Daisuke Shiraishi | 2012-10-09 |
| 8083960 | Etching endpoint determination method | Hiroshige Uchida, Daisuke Shiraishi, Akira Kagoshima | 2011-12-27 |
| 8038896 | Plasma processing method and apparatus | Eiji Ikegami, Takeshi Shimada, Kenichi Kuwabara, Takao Arase, Tsuyoshi Matsumoto | 2011-10-18 |
| 7601240 | Disturbance-free, recipe-controlled plasma processing system and method | Akira Kagoshima, Hideyuki Yamamoto, Toshio Masuda, Hiroyuki Kitsunai, Junichi Tanaka +2 more | 2009-10-13 |
| 7376479 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Kazue Takahashi | 2008-05-20 |
| 7343217 | System for monitoring and controlling a semiconductor manufacturing apparatus using prediction model equation | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto +1 more | 2008-03-11 |
| 7330346 | Etching apparatus, method for measuring self-bias voltage, and method for monitoring etching apparatus | Hideyuki Yamamoto, Daisuke Shiraishi, Akira Kagoshima | 2008-02-12 |
| 7158848 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Kazue Takahashi | 2007-01-02 |
| 7107115 | Method for controlling semiconductor processing apparatus | Junichi Tanaka, Hideyuki Yamamoto, Akira Kagoshima | 2006-09-12 |
| 7062347 | Maintenance method and system for plasma processing apparatus | Hideyuki Yamamoto, Toshio Masuda, Akira Kagoshima, Junichi Tanaka | 2006-06-13 |
| 7058467 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Kazue Takahashi | 2006-06-06 |
| 7058470 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto +1 more | 2006-06-06 |
| 7010374 | Method for controlling semiconductor processing apparatus | Junichi Tanaka, Hideyuki Yamamoto, Akira Kagoshima | 2006-03-07 |
| 6939433 | Sample processing apparatus and sample processing system | Hideyuki Yamamoto | 2005-09-06 |
| 6941185 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Tetsuya Tahara, Shoji Okiguchi | 2005-09-06 |
| 6939435 | Plasma processing apparatus and processing method | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Akira Kagoshima | 2005-09-06 |
| 6908529 | Plasma processing apparatus and method | Hideyuki Yamamoto, Akira Kagoshima, Daisuke Shiraishi, Junichi Tanaka | 2005-06-21 |
| 6885906 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Tetsuya Tahara, Shoji Okiguchi | 2005-04-26 |
| 6881352 | Disturbance-free, recipe-controlled plasma processing method | Akira Kagoshima, Hideyuki Yamamoto, Toshio Masuda, Hiroyuki Kitsunai, Junichi Tanaka +2 more | 2005-04-19 |
| 6879867 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Kazue Takahashi | 2005-04-12 |
| 6853872 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Tetsuya Tahara, Shoji Okiguchi | 2005-02-08 |