Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872774 | Plasma processing apparatus and plasma processing method | Hao Xu, Shigeru Nakamoto, Kousuke Fukuchi, Satomi Inoue | 2020-12-22 |
| 8114244 | Method for etching a sample | Kousa Hirota, Yasuhiro Nishimori | 2012-02-14 |
| 8083960 | Etching endpoint determination method | Daisuke Shiraishi, Shoji Ikuhara, Akira Kagoshima | 2011-12-27 |
| 5803972 | Semiconductor fabrication apparatus | Mitsuo Sato | 1998-09-08 |