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Plasma processing method |
Shunsuke Kanazawa |
2018-02-20 |
| 8931294 |
Cooling unit and work piece conveying equipment using it |
Takaya Yamada |
2015-01-13 |
| 8486291 |
Plasma processing method |
Takeshi Ohmori, Hiroaki Ishimura, Hitoshi Kobayashi, Masamichi Sakaguchi |
2013-07-16 |
| 8277563 |
Plasma processing method |
Masunori Ishihara, Masamichi Sakaguchi, Yutaka Kudou, Satoshi Une |
2012-10-02 |
| 8203101 |
Conveying device |
Akira Miyamoto, Daisuke Sado, Akira Okamoto, Hideki Matsuo |
2012-06-19 |
| 8114244 |
Method for etching a sample |
Kousa Hirota, Hiroshige Uchida |
2012-02-14 |
| 8075733 |
Plasma processing apparatus |
Seiichi Watanabe, Naoki Yasui, Susumu Tauchi |
2011-12-13 |
| 7909933 |
Plasma processing method |
Masunori Ishihara, Masamichi Sakaguchi, Yutaka Kudou, Satoshi Une |
2011-03-22 |
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Vacuum processing apparatus and vacuum processing method |
Yoshitaka Kai, Kenichi Kuwabara, Takeo Uchino, Takeshi Oono, Takeshi Shimada |
2006-09-26 |
| 7049243 |
Surface processing method of a specimen and surface processing apparatus of the specimen |
Tetsuo Ono, Takashi Sato, Naoyuki Kofuji, Masaru Izawa, Yasushi Goto +7 more |
2006-05-23 |
| 6946847 |
Impedance matching device provided with reactance-impedance table |
Shuji Omae, Masakatsu Mito, Yuji Ishida, Koji Itadani |
2005-09-20 |
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Specimen surface processing method |
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2004-01-13 |
| 6492277 |
Specimen surface processing method and apparatus |
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2002-12-10 |
| 6291999 |
Plasma monitoring apparatus |
Michio Taniguchi, Kazuki Kondo |
2001-09-18 |