Issued Patents All Time
Showing 25 most recent of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094687 | Plasma processing apparatus and plasma processing method | Masayuki Shiina, Naoki Yasui | 2024-09-17 |
| 11658011 | Plasma processing apparatus | Yoshiharu Inoue, Michikazu Morimoto, Masaki Fujii, Masakazu Miyaji | 2023-05-23 |
| 11417501 | Plasma processing apparatus and plasma processing method | Masayuki Shiina, Naoki Yasui | 2022-08-16 |
| 11018014 | Dry etching method | Ze Shen, Hisao Yasunami | 2021-05-25 |
| 10727088 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi, Yuuzou Oohirabaru | 2020-07-28 |
| 10600619 | Plasma processing apparatus | Yoshiharu Inoue, Michikazu Morimoto, Masaki Fujii, Masakazu Miyaji | 2020-03-24 |
| 10559481 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi, Yuuzou Oohirabaru | 2020-02-11 |
| 10522331 | Plasma processing apparatus | Yasuo Ohgoshi, Michikazu Morimoto, Yuuzou Oohirabaru | 2019-12-31 |
| 10121640 | Method and apparatus for plasma processing | Satoru Muto, Yasuo Ohgoshi, Hirofumi Eitoku | 2018-11-06 |
| 10090162 | Plasma processing method and plasma processing device | Junya Tanaka | 2018-10-02 |
| 9514967 | Plasma processing apparatus | Yasuo Ohgoshi, Michikazu Morimoto, Yuuzou Oohirabaru | 2016-12-06 |
| 9349603 | Plasma processing method | Yoshiharu Inoue, Michikazu Morimoto, Masaki Fujii, Masakazu Miyaji | 2016-05-24 |
| 9305803 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi, Yuuzou Oohirabaru | 2016-04-05 |
| 8969211 | Method and apparatus for plasma processing | Satoru Muto, Yasuo Ohgoshi, Hirofumi Eitoku | 2015-03-03 |
| 8889024 | Plasma etching method | Tomoyuki Watanabe, Michikazu Morimoto, Mamoru Yakushiji | 2014-11-18 |
| 8828254 | Plasma processing method | Yoshiharu Inoue, Michikazu Morimoto, Masaki Fujii, Masakazu Miyaji | 2014-09-09 |
| 8801951 | Plasma processing method | Yoshiharu Inoue, Michikazu Morimoto, Tsuyoshi Matsumoto, Tadamitsu Kanekiyo, Mamoru Yakushiji +1 more | 2014-08-12 |
| 8741166 | Plasma etching method | Tomoyuki Watanabe, Michikazu Morimoto, Mamoru Yakushiji | 2014-06-03 |
| 8580131 | Plasma etching method | Tomoyuki Watanabe, Mamoru Yakushiji, Michikazu Morimoto | 2013-11-12 |
| 8501608 | Method for processing semiconductor device | Tetsu Morooka | 2013-08-06 |
| 8440513 | Method of semiconductor processing | Go Saito | 2013-05-14 |
| 8365993 | Self scanning system | Kazuharu Teraoka, Ryouichi Katata | 2013-02-05 |
| 8071397 | Semiconductor fabricating apparatus with function of determining etching processing state | Tatehito Usui, Motohiko Yoshigai, Kazuhiro Jyouo | 2011-12-06 |
| 7771607 | Plasma processing apparatus and plasma processing method | Tsutomu Tetsuka, Kazuyuki Ikenaga, Motohiko Yoshigai, Naoshi Itabashi | 2010-08-10 |
| 7611993 | Plasma processing method and plasma processing apparatus | Katsumi Setoguchi, Hideyuki Yamamoto | 2009-11-03 |