| 12094687 |
Plasma processing apparatus and plasma processing method |
Masayuki Shiina, Naoki Yasui |
2024-09-17 |
|
| 11658011 |
Plasma processing apparatus |
Yoshiharu Inoue, Michikazu Morimoto, Masaki Fujii, Masakazu Miyaji |
2023-05-23 |
|
| 11417501 |
Plasma processing apparatus and plasma processing method |
Masayuki Shiina, Naoki Yasui |
2022-08-16 |
|
| 11018014 |
Dry etching method |
Ze Shen, Hisao Yasunami |
2021-05-25 |
|
| 10727088 |
Plasma processing apparatus and plasma processing method |
Michikazu Morimoto, Yasuo Ohgoshi, Yuuzou Oohirabaru |
2020-07-28 |
|
| 10600619 |
Plasma processing apparatus |
Yoshiharu Inoue, Michikazu Morimoto, Masaki Fujii, Masakazu Miyaji |
2020-03-24 |
|
| 10559481 |
Plasma processing apparatus and plasma processing method |
Michikazu Morimoto, Yasuo Ohgoshi, Yuuzou Oohirabaru |
2020-02-11 |
|
| 10522331 |
Plasma processing apparatus |
Yasuo Ohgoshi, Michikazu Morimoto, Yuuzou Oohirabaru |
2019-12-31 |
|
| 10121640 |
Method and apparatus for plasma processing |
Satoru Muto, Yasuo Ohgoshi, Hirofumi Eitoku |
2018-11-06 |
|
| 10090162 |
Plasma processing method and plasma processing device |
Junya Tanaka |
2018-10-02 |
|
| 9514967 |
Plasma processing apparatus |
Yasuo Ohgoshi, Michikazu Morimoto, Yuuzou Oohirabaru |
2016-12-06 |
|
| 9349603 |
Plasma processing method |
Yoshiharu Inoue, Michikazu Morimoto, Masaki Fujii, Masakazu Miyaji |
2016-05-24 |
|
| 9305803 |
Plasma processing apparatus and plasma processing method |
Michikazu Morimoto, Yasuo Ohgoshi, Yuuzou Oohirabaru |
2016-04-05 |
|
| 8969211 |
Method and apparatus for plasma processing |
Satoru Muto, Yasuo Ohgoshi, Hirofumi Eitoku |
2015-03-03 |
|
| 8889024 |
Plasma etching method |
Tomoyuki Watanabe, Michikazu Morimoto, Mamoru Yakushiji |
2014-11-18 |
|
| 8828254 |
Plasma processing method |
Yoshiharu Inoue, Michikazu Morimoto, Masaki Fujii, Masakazu Miyaji |
2014-09-09 |
|
| 8801951 |
Plasma processing method |
Yoshiharu Inoue, Michikazu Morimoto, Tsuyoshi Matsumoto, Tadamitsu Kanekiyo, Mamoru Yakushiji +1 more |
2014-08-12 |
|
| 8741166 |
Plasma etching method |
Tomoyuki Watanabe, Michikazu Morimoto, Mamoru Yakushiji |
2014-06-03 |
|
| 8580131 |
Plasma etching method |
Tomoyuki Watanabe, Mamoru Yakushiji, Michikazu Morimoto |
2013-11-12 |
|
| 8501608 |
Method for processing semiconductor device |
Tetsu Morooka |
2013-08-06 |
|
| 8440513 |
Method of semiconductor processing |
Go Saito |
2013-05-14 |
|
| 8365993 |
Self scanning system |
Kazuharu Teraoka, Ryouichi Katata |
2013-02-05 |
|
| 8071397 |
Semiconductor fabricating apparatus with function of determining etching processing state |
Tatehito Usui, Motohiko Yoshigai, Kazuhiro Jyouo |
2011-12-06 |
$158,000 |
| 7771607 |
Plasma processing apparatus and plasma processing method |
Tsutomu Tetsuka, Kazuyuki Ikenaga, Motohiko Yoshigai, Naoshi Itabashi |
2010-08-10 |
$54,000 |
| 7611993 |
Plasma processing method and plasma processing apparatus |
Katsumi Setoguchi, Hideyuki Yamamoto |
2009-11-03 |
$81,000 |
