Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7601241 | Plasma processing apparatus and plasma processing method | Tsutomu Tetsuka, Kazuyuki Ikenaga, Motohiko Yoshigai, Naoshi Itabashi | 2009-10-13 |
| 7259866 | Semiconductor fabricating apparatus with function of determining etching processing state | Tatehito Usui, Motohiko Yoshigai, Kazuhiro Jyouo | 2007-08-21 |
| 7259104 | Sample surface processing method | Takafumi Tokunaga, Tadashi Umezawa, Motohiko Yoshigai, Tatsumi Mizutani, Tokuo Kure +3 more | 2007-08-21 |
| 7049243 | Surface processing method of a specimen and surface processing apparatus of the specimen | Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa, Yasushi Goto +7 more | 2006-05-23 |
| 6972848 | Semiconductor fabricating apparatus with function of determining etching processing state | Tatehito Usui, Motohiko Yoshigai, Kazuhiro Jyouo | 2005-12-06 |
| 6967109 | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units | Tatehito Usui, Ryoji Nishio, Kazue Takahashi, Nobuyuki Mise | 2005-11-22 |
| 6888094 | Plasma processing method and plasma processing apparatus | Katsumi Setoguchi, Hideyuki Yamamoto | 2005-05-03 |
| 6849191 | Method and apparatus for treating surface of semiconductor | Tatsumi Mizutani, Ryouji Hamasaki, Tokuo Kure, Takafumi Tokunaga, Masayuki Kojima | 2005-02-01 |
| 6767838 | Method and apparatus for treating surface of semiconductor | Tatsumi Mizutani, Ryouji Hamasaki, Tokuo Kure, Takafumi Tokunaga, Masayuki Kojima | 2004-07-27 |
| 6759253 | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units | Tatehito Usui, Ryoji Nishio, Kazue Takahashi, Nobuyuki Mise | 2004-07-06 |
| 6700090 | Plasma processing method and plasma processing apparatus | Katsumi Setoguchi, Hideyuki Yamamoto | 2004-03-02 |
| 6677244 | Specimen surface processing method | Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa, Yasushi Goto +7 more | 2004-01-13 |
| 6660647 | Method for processing surface of sample | Takafumi Tokunaga, Tadashi Umezawa, Motohiko Yoshigai, Tatsumi Mizutani, Tokuo Kure +3 more | 2003-12-09 |
| 6656752 | Ion current density measuring method and instrument, and semiconductor device manufacturing method | Nobuyuki Mise, Tatehito Usui, Masato Ikegawa, Kazuo Nojiri, Kazuyuki Tsunokuni | 2003-12-02 |
| 6492277 | Specimen surface processing method and apparatus | Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa, Yasushi Goto +7 more | 2002-12-10 |
| 6488722 | Method and apparatus for spheroidizing particles | — | 2002-12-03 |
| 6083286 | High-concentration coal/water mixture fuel and process for production thereof | — | 2000-07-04 |
| 6033481 | Plasma processing apparatus | Ken'etsu Yokogawa, Kazunori Tsujimoto, Naoshi Itabashi, Masahito Mori, Shinichi Tachi +1 more | 2000-03-07 |
| 5895586 | Plasma processing apparatus and plasma processing method in which a part of the processing chamber is formed using a pre-fluorinated material of aluminum | Tetsunori Kaji, Saburo Kanai, Satoshi Ito, Ryoji Hamasaki, Tatehito Usui +2 more | 1999-04-20 |
| 5891252 | Plasma processing apparatus | Ken'etsu Yokogawa, Kazunori Tsujimoto, Naoshi Itabashi, Masahito Mori, Shinichi Tachi +1 more | 1999-04-06 |
| 5505778 | Surface treating apparatus, surface treating method and semiconductor device manufacturing method | Susumu Hiraoka, Sakae Saito, Kunio Harada, Mituhiro Tachibana, Shigeo Kubota +1 more | 1996-04-09 |
| 5462635 | Surface processing method and an apparatus for carrying out the same | Tatsumi Mizutani, Keizo Suzuki | 1995-10-31 |
| 5401357 | Dry etching method | Hidekazu Okuhira, Susumu Hiraoka, Keizo Suzuki, Junji Shigeta, Hiroshi Masuda +4 more | 1995-03-28 |
| 5110407 | Surface fabricating device | Susumu Hiraoka, Keizo Suzuki | 1992-05-05 |
| 5074760 | Scroll type compressor | Katsumi Hirooka, Takahisa Hirano, Ryuhei Tanigaki | 1991-12-24 |