Issued Patents All Time
Showing 25 most recent of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379365 | Effective material age estimation device, compressive strength estimation device, and program | Takafumi Noguchi, Bochao Sun, Masahiro Hayasaki, Shigeyuki Nishijima | 2025-08-05 |
| 10538068 | Method for producing functional-substance thin film material, functional-substance thin film material, and laminate thereof | Takeshi Chakihara, Shuichi Iwanaga, Hiroshi Mino, Yoshinari Yasui | 2020-01-21 |
| 9384059 | Comparing resource costs between allocation plans in a load balance apparatus | Xianchun Xu, Toru Takahashi | 2016-07-05 |
| 9080334 | Recyclable formwork | Masahiro Hayasaki, Shigeyuki Nishijima | 2015-07-14 |
| 9074378 | Recyclable formwork | Masahiro Hayasaki, Shigeyuki Nishijima | 2015-07-07 |
| 8567417 | Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method | Yuji Kamikawa, Hiroaki Inadomi, Hiroshi Komiya, Koji Egashira | 2013-10-29 |
| 8097048 | Polyphenylene sulfide member and method for producing the same | Kenzo Kubo, Makoto Nakahara, Taizo Horiike, Ryutaro Ito, Koji Sumi | 2012-01-17 |
| 7998306 | Substrate processing apparatus | Koukichi Hiroshiro, Kazuhiro Takeshita, Takayuki Toshima | 2011-08-16 |
| 7686917 | Plasma processing system and apparatus and a sample processing method | Toshio Masuda, Tatehito Usui, Mitsuru Suehiro, Hiroshi Kanekiyo, Kazue Takahashi +1 more | 2010-03-30 |
| 7611993 | Plasma processing method and plasma processing apparatus | Tetsuo Ono, Katsumi Setoguchi | 2009-11-03 |
| 7601240 | Disturbance-free, recipe-controlled plasma processing system and method | Akira Kagoshima, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai, Junichi Tanaka +2 more | 2009-10-13 |
| 7526948 | Device and method for detecting foreign material on the surface of plasma processing apparatus | Hiromichi Enami, Muneo Furuse | 2009-05-05 |
| 7473332 | Method for processing semiconductor | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi | 2009-01-06 |
| 7464152 | Integrated service management system for remote customer support | Takeshi Ishizaki, Shigeru Miyake, Koichiro Otani | 2008-12-09 |
| 7376479 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Junichi Tanaka, Hiroyuki Kitsunai, Shoji Ikuhara, Kazue Takahashi | 2008-05-20 |
| 7343217 | System for monitoring and controlling a semiconductor manufacturing apparatus using prediction model equation | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Shoji Ikuhara +1 more | 2008-03-11 |
| 7330346 | Etching apparatus, method for measuring self-bias voltage, and method for monitoring etching apparatus | Shoji Ikuhara, Daisuke Shiraishi, Akira Kagoshima | 2008-02-12 |
| 7277237 | AF control apparatus for zoom lens system | Noboru Saito, Takamitsu Sasaki | 2007-10-02 |
| 7183715 | Method for operating a semiconductor processing apparatus | Seiichiro Kanno, Ryoji Nishio, Ken Yoshioka, Saburou Kanai, Hideki Kihara | 2007-02-27 |
| 7169254 | Plasma processing system and apparatus and a sample processing method | Toshio Masuda, Tatehito Usui, Mitsuru Suehiro, Hiroshi Kanekiyo, Kazue Takahashi +1 more | 2007-01-30 |
| 7166480 | Particle control device and particle control method for vacuum processing apparatus | Daisuke Shiraishi, Akira Kagoshima, Takeshi Arai, Hiroyuki Nakano | 2007-01-23 |
| 7158848 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Junichi Tanaka, Hiroyuki Kitsunai, Shoji Ikuhara, Kazue Takahashi | 2007-01-02 |
| 7147747 | Plasma processing apparatus and plasma processing method | Go Miya, Hiroyuki Kitsunai, Junichi Tanaka, Toshio Masuda | 2006-12-12 |
| 7147748 | Plasma processing method | Go Miya, Hiroyuki Kitsunai, Junichi Tanaka, Toshio Masuda | 2006-12-12 |
| 7126697 | Method and apparatus for determining endpoint of semiconductor element fabricating process | Tatehito Usui, Takashi Fujii, Motohiko Yoshigai, Tetsunori Kaji | 2006-10-24 |