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Charged particle beam device |
Takafumi Miwa, Kazuma Tanii, Seiichiro Kanno |
2024-10-01 |
| 11735394 |
Charged particle beam apparatus |
Takafumi Miwa, Seiichiro Kanno |
2023-08-22 |
| 10872742 |
Charged particle beam device |
Takafumi Miwa, Seiichiro Kanno |
2020-12-22 |
| 10128141 |
Plasma processing apparatus and plasma processing method |
Takumi Tandou, Masaru Izawa, Hiromichi Kawasaki |
2018-11-13 |
| 9799486 |
Charged particle beam apparatus for measuring surface potential of a sample |
Seiichiro Kanno, Yasushi Ebizuka, Takafumi Miwa |
2017-10-24 |
| 9704731 |
Plasma processing apparatus and plasma processing method |
Masaru Izawa, Takumi Tandou |
2017-07-11 |
| 9401297 |
Electrostatic chuck mechanism and charged particle beam apparatus |
Yasushi Ebizuka, Seiichiro Kanno, Masaya Yasukochi, Masakazu Takahashi, Naoya Ishigaki |
2016-07-26 |
| 8921781 |
Measurement or inspecting apparatus |
Seiichiro Kanno, Hiroyuki Kitsunai, Masaru Matsushima, Toru Shuto |
2014-12-30 |
| 8653455 |
Charged particle beam device and evaluation method using the charged particle beam device |
Hiroyuki Kitsunai, Seiichiro Kanno, Masaru Matsushima, Shuichi Nakagawa |
2014-02-18 |
| 8519332 |
Semiconductor inspecting apparatus |
Seiichiro Kanno, Hiroyuki Kitsunai, Masaru Matsushima, Toru Shuto |
2013-08-27 |
| 8231759 |
Plasma processing apparatus |
Manabu Edamura, Ken Yoshioka |
2012-07-31 |
| 8232522 |
Semiconductor inspecting apparatus |
Seiichiro Kanno, Hiroyuki Kitsunai, Masaru Matsushima, Toru Shuto |
2012-07-31 |
| 8083889 |
Apparatus and method for plasma etching |
Manabu Edamura, Ken Yoshioka, Ryoji Nishio |
2011-12-27 |
| 7887669 |
Vacuum processing apparatus |
Kouhei Satou, Hiroshi Akiyama |
2011-02-15 |
| 7744721 |
Plasma processing apparatus |
Manabu Edamura, Ken Yoshioka |
2010-06-29 |
| 7713756 |
Apparatus and method for plasma etching |
Manabu Edamura, Ken Yoshioka, Ryoji Nishio |
2010-05-11 |
| 7396771 |
Plasma etching apparatus and plasma etching method |
Seiichiro Kanno, Naoshi Itabashi, Motohiko Yoshigai, Junichi Tanaka, Masahito Mori +2 more |
2008-07-08 |
| 7147747 |
Plasma processing apparatus and plasma processing method |
Hiroyuki Kitsunai, Junichi Tanaka, Toshio Masuda, Hideyuki Yamamoto |
2006-12-12 |
| 7147748 |
Plasma processing method |
Hiroyuki Kitsunai, Junichi Tanaka, Toshio Masuda, Hideyuki Yamamoto |
2006-12-12 |
| 6899766 |
Diagnosis method for semiconductor processing apparatus |
Junichi Tanaka, Tsutomu Tetsuka, Hideyuki Yamamoto |
2005-05-31 |
| 6866744 |
Semiconductor processing apparatus and a diagnosis method therefor |
Junichi Tanaka, Tsutomu Tetsuka, Hideyuki Yamamoto |
2005-03-15 |