Issued Patents All Time
Showing 1–25 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12037507 | Resin composition for generating allylphenol-maleimide copolymer for electronic component protective film, and electronic component protective film comprising this copolymer | Keiko Ohtsuka, Morio Yonekawa, Hajime Kimura, Nobuhiro Kanamaru, Masaki Suwa +1 more | 2024-07-16 |
| 11065985 | Vehicle seat device | Yasuhiko Maekawa, Shotaro Aratake | 2021-07-20 |
| 9378929 | Plasma processing apparatus and plasma processing method | Kenji Maeda, Hiromichi Kawasaki, Takahiro Shimomura | 2016-06-28 |
| 9039865 | Plasma processing apparatus | Motohiko Yoshigai, Ryoji Nishio, Tadayoshi Kawaguchi | 2015-05-26 |
| 9017786 | Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck device | Syuichi Takahashi, Yasuharu Sasaki | 2015-04-28 |
| 8951385 | Plasma processing apparatus and plasma processing method | Kenji Maeda, Hiromichi Kawasaki, Takahiro Shimomura | 2015-02-10 |
| 8940128 | Plasma processing apparatus | Yusaku Sakka, Ryoji Nishio | 2015-01-27 |
| 8795467 | Plasma processing apparatus and method | Ryoji Nishio, Saburou Kanai, Tadamitsu Kanekiyo, Hideki Kihara, Koji Okuda | 2014-08-05 |
| 8282848 | Plasma processing method and plasma processing apparatus | Yutaka Ohmoto, Mamoru Yakushiji, Yutaka Kouzuma, Tsunehiko Tsubone | 2012-10-09 |
| 8252132 | Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck device | Syuichi Takahashi, Yasuharu Sasaki | 2012-08-28 |
| 8231759 | Plasma processing apparatus | Manabu Edamura, Go Miya | 2012-07-31 |
| 8092637 | Manufacturing method in plasma processing apparatus | Yutaka Kouzuma, Yutaka Ohmoto, Mamoru Yakushiji, Tsunehiko Tsubone | 2012-01-10 |
| 8083889 | Apparatus and method for plasma etching | Go Miya, Manabu Edamura, Ryoji Nishio | 2011-12-27 |
| 8062473 | Plasma processing apparatus and method | Ryoji Nishio, Saburou Kanai, Tadamitsu Kanekiyo, Hideki Kihara, Koji Okuda | 2011-11-22 |
| 7833429 | Plasma processing method | Ryoji Nishio, Saburou Kanai, Tadamitsu Kanekiyo, Hideki Kihara, Koji Okuda | 2010-11-16 |
| 7744721 | Plasma processing apparatus | Manabu Edamura, Go Miya | 2010-06-29 |
| 7740739 | Plasma processing apparatus and method | Ryoji Nishio, Saburou Kanai, Tadamitsu Kanekiyo, Hideki Kihara, Koji Okuda | 2010-06-22 |
| 7713756 | Apparatus and method for plasma etching | Go Miya, Manabu Edamura, Ryoji Nishio | 2010-05-11 |
| 7608162 | Plasma processing apparatus and method | Yutaka Ohmoto, Hironobu Kawahara, Kazue Takahashi, Saburou Kanai | 2009-10-27 |
| 7347656 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 2008-03-25 |
| 7288166 | Plasma processing apparatus | Yutaka Ohmoto, Hironobu Kawahara, Kazue Takahashi, Saburou Kanai | 2007-10-30 |
| RE39895 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Tatsumi Mizutani, Kazutami Tago, Hideyuki Kazumi | 2007-10-23 |
| 7224568 | Plasma processing method and plasma processing apparatus | Hiroaki Ishimura, Takahiro Abe, Go Saito, Motohiko Yoshigai | 2007-05-29 |
| 7201551 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 2007-04-10 |
| 7183715 | Method for operating a semiconductor processing apparatus | Seiichiro Kanno, Ryoji Nishio, Saburou Kanai, Hideki Kihara, Hideyuki Yamamoto | 2007-02-27 |