Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456183 | Plasma processing method and plasma ashing apparatus | Toru Ito, Masahito Mori | 2022-09-27 |
| 9038567 | Plasma processing apparatus | Hiroyuki Kobayashi, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa | 2015-05-26 |
| 8801951 | Plasma processing method | Yoshiharu Inoue, Michikazu Morimoto, Tsuyoshi Matsumoto, Tetsuo Ono, Mamoru Yakushiji +1 more | 2014-08-12 |
| 8795467 | Plasma processing apparatus and method | Ryoji Nishio, Ken Yoshioka, Saburou Kanai, Hideki Kihara, Koji Okuda | 2014-08-05 |
| 8733282 | Plasma processing apparatus | Hiroyuki Kobayashi, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa | 2014-05-27 |
| 8632637 | Method and apparatus for plasma processing | Ryoji Nishio, Yoshiyuki Oota, Tsuyoshi Matsumoto | 2014-01-21 |
| 8397668 | Plasma processing apparatus | Hiroyuki Kobayashi, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa | 2013-03-19 |
| 8366870 | Method and apparatus for plasma processing | Ryoji Nishio, Yoshiyuki Oota, Tsuyoshi Matsumoto | 2013-02-05 |
| 8163652 | Plasma processing method and plasma processing device | Kenji Maeda, Tomoyuki Tamura, Hiroyuki Kobayashi, Kenetsu Yokogawa | 2012-04-24 |
| 8062473 | Plasma processing apparatus and method | Ryoji Nishio, Ken Yoshioka, Saburou Kanai, Hideki Kihara, Koji Okuda | 2011-11-22 |
| 8057634 | Method and apparatus for plasma processing | Ryoji Nishio, Yoshiyuki Oota, Tsuyoshi Matsumoto | 2011-11-15 |
| 7947189 | Vacuum processing apparatus and vacuum processing method of sample | Tooru Aramaki, Tsunehiko Tsubone, Shigeru Shirayone, Hideki Kihara | 2011-05-24 |
| 7833429 | Plasma processing method | Ryoji Nishio, Ken Yoshioka, Saburou Kanai, Hideki Kihara, Koji Okuda | 2010-11-16 |
| 7740739 | Plasma processing apparatus and method | Ryoji Nishio, Ken Yoshioka, Saburou Kanai, Hideki Kihara, Koji Okuda | 2010-06-22 |
| 7662232 | Plasma processing apparatus | Hiroyuki Kobayashi, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa | 2010-02-16 |
| 7658815 | Plasma processing apparatus capable of controlling plasma emission intensity | Kenji Maeda, Kenetsu Yokogawa | 2010-02-09 |
| 7435687 | Plasma processing method and plasma processing device | Kenji Maeda, Tomoyuki Tamura, Hiroyuki Kobayashi, Kenetsu Yokogawa | 2008-10-14 |
| 6914207 | Plasma processing method | Tadayoshi Kawaguchi, Akihiko Mitsuda, Takeshi Shimada, Saburou Kanai | 2005-07-05 |
| 6586887 | High-frequency power supply apparatus for plasma generation apparatus | Yasuo Oogoshi, Youji Takahashi, Tsuyoshi Umemoto | 2003-07-01 |
| 6156663 | Method and apparatus for plasma processing | Katsuya Watanabe, Saburo Kanai, Ryoji Hamasaki, Tsuyoshi Yoshida, Yutaka Omoto +3 more | 2000-12-05 |
| 5961850 | Plasma processing method and apparatus | Yoshiaki Satou, Katsuyoshi Kudo | 1999-10-05 |
| 5320707 | Dry etching method | Hironobu Kawahara, Yoshiaki Sato, Kotaro Fujimoto | 1994-06-14 |