Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8506834 | Method for dry etching Al2O3 film | Kentaro Yamada, Takeshi Shimada | 2013-08-13 |
| 7662235 | Method of cleaning etching apparatus | Atsushi Yoshida, Takeshi Shimada | 2010-02-16 |
| 7186659 | Plasma etching method | Takeshi Shimada | 2007-03-06 |
| 6391466 | Thermal transfer recording medium | Jun Sogabe, Tetuo Hoshino, Yoshiyuki Asabe, Susumu Arauchi | 2002-05-21 |
| 5320707 | Dry etching method | Tadamitsu Kanekiyo, Hironobu Kawahara, Yoshiaki Sato | 1994-06-14 |
| 4985113 | Sample treating method and apparatus | Yoshie Tanaka, Hironobu Kawahara, Yoshiaki Sato | 1991-01-15 |