Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4985113 | Sample treating method and apparatus | Kotaro Fujimoto, Hironobu Kawahara, Yoshiaki Sato | 1991-01-15 |
| 4609426 | Method and apparatus for monitoring etching | Yoshifumi Ogawa, Masaharu Nishiumi, Sadayuki Okudaira, Shigeru Nishimatsu | 1986-09-02 |