Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6754552 | Control apparatus for plasma utilizing equipment | Hiromichi Enami | 2004-06-22 |
| 6046425 | Plasma processing apparatus having insulator disposed on inner surface of plasma generating chamber | Tetsunori Kaji, Takashi Fujii, Motohiko Yoshigai, Yoshinao Kawasaki | 2000-04-04 |
| 5432315 | Plasma process apparatus including ground electrode with protection film | Tetsunori Kaji, Takashi Fujii, Motohiko Yoshigai, Yoshinao Kawasaki | 1995-07-11 |
| 5290993 | Microwave plasma processing device | Tetsunori Kaji, Takashi Fujii, Motohiko Yoshigai, Yoshinao Kawasaki | 1994-03-01 |
| 5110408 | Process for etching | Takashi Fujii, Hironobu Kawahara, Kazuo Takata, Noriaki Yamamoto | 1992-05-05 |
| 4618398 | Dry etching method | Makoto Nawata, Ryoji Fukuyama, Norio Nakazato | 1986-10-21 |
| 4609426 | Method and apparatus for monitoring etching | Yoshifumi Ogawa, Yoshie Tanaka, Sadayuki Okudaira, Shigeru Nishimatsu | 1986-09-02 |