Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835465 | Detecting method and detecting device of gas components and processing apparatus using detecting device of gas components | Yutaka Kouzuma, Masaru Izawa | 2023-12-05 |
| D924824 | Ion shield plate base for semiconductor manufacturing apparatus | Yutaka Kouzuma, Kazuyuki Hirozane, Michiaki Kobayashi | 2021-07-13 |
| 10121686 | Vacuum processing apparatus | Masanori Kadotani, Masakazu Isozaki, Nobuhide Nunomura | 2018-11-06 |
| 9273394 | Plasma processing apparatus and diagnosis method thereof | Masahiro Nagatani | 2016-03-01 |
| 9245780 | Vacuum processing apparatus and operating method of the same | Takahiro Shimomura, Susumu Tauchi | 2016-01-26 |
| 6899789 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 2005-05-31 |
| 6676805 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 2004-01-13 |
| 6645871 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-11-11 |
| 6610170 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-08-26 |
| 6610171 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-08-26 |
| 6544379 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-04-08 |
| 6524428 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-02-25 |
| 6336991 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 2002-01-08 |
| 6221201 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 2001-04-24 |
| 6048434 | Substrate holding system including an electrostatic chuck | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 2000-04-11 |
| 5985035 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 1999-11-16 |
| 5961774 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 1999-10-05 |
| 5906684 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 1999-05-25 |
| 5821622 | Liquid crystal display device | Yoshiko Tsuji, Mitsushi Ikeda, Hisao Toeda, Toshiyuki Oka | 1998-10-13 |
| 5792304 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Hiroyuki Shichida, Tsunehiko Tsubone | 1998-08-11 |
| 5738948 | Electrode-wiring material and electrode-wiring substrate using the same | Mitsushi Ikeda, Yoshiko Tsuji, Yujiro Hara, Masaki Atsuta, Toshiyuki Oka +1 more | 1998-04-14 |
| 5685684 | Vacuum processing system | Shigekazu Kato, Naoyuki Tamura, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou +1 more | 1997-11-11 |
| 5646489 | Plasma generator with mode restricting means | Yutaka Kakehi, Yoshinao Kawasaki, Keizo Suzuki, Kazuo Nojiri, Hiromichi Enami +2 more | 1997-07-08 |
| 5433789 | Methods and apparatus for generating plasma, and semiconductor processing methods using mode restricted microwaves | Yutaka Kakehi, Yoshinao Kawasaki, Keizo Suzuki, Kazuo Nojiri, Hiromichi Enami +2 more | 1995-07-18 |
| 5296653 | Device having a multi-layered conductor structure | Toshiya Kiyota, Mitsushi Ikeda, Meiko Ogawa, Michio Murooka | 1994-03-22 |