Issued Patents All Time
Showing 1–25 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7367135 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2008-05-06 |
| RE39824 | Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Tsuenhiko Tsubone, Atsushi Itou | 2007-09-11 |
| RE39823 | Vacuum processing operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2007-09-11 |
| RE39775 | Vacuum processing operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Tsuenhiko Tsubone, Atsushi Itou | 2007-08-21 |
| RE39776 | Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2007-08-21 |
| RE39756 | Vacuum processing operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2007-08-07 |
| 7089680 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2006-08-15 |
| 6968630 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2005-11-29 |
| 6941185 | Operating method of vacuum processing system and vacuum processing system | Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2005-09-06 |
| 6920369 | Methods of operating vacuum processing equipment and methods of processing wafers | Tooru Ueno, Shigeru Nakamoto, Shoji Okiguchi, Hideki Yamasaki | 2005-07-19 |
| 6917844 | Vacuum process apparatus and method of operating the same | Tomoyuki Kawano, Tetsuya Tahara, Shoji Okiguchi, Hideki Yamasaki | 2005-07-12 |
| 6904699 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2005-06-14 |
| 6886272 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2005-05-03 |
| 6885906 | Operating method of vacuum processing system and vacuum processing system | Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2005-04-26 |
| 6880264 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2005-04-19 |
| 6853872 | Operating method of vacuum processing system and vacuum processing system | Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2005-02-08 |
| 6795745 | Methods of operating vacuum processing equipment and methods of processing wafers | Tooru Ueno, Shigeru Nakamoto, Shoji Okiguchi, Hideki Yamasaki | 2004-09-21 |
| 6745093 | Vacuum process apparatus and method of operating the same | Tomoyuki Kawano, Tetsuya Tahara, Shoji Okiguchi, Hideki Yamasaki | 2004-06-01 |
| 6714832 | Operating method of vacuum processing system and vacuum processing system | Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2004-03-30 |
| 6662465 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2003-12-16 |
| 6655044 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2003-12-02 |
| 6634116 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2003-10-21 |
| 6625899 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2003-09-30 |
| 6596551 | Etching end point judging method, etching end point judging device, and insulating film etching method using these methods | Tatehito Usui, Ken Yoshioka, Shoji Ikuhara, Kazue Takahashi, Tetsunori Kaji +1 more | 2003-07-22 |
| 6588121 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2003-07-08 |