Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8033770 | Vacuum processing apparatus | Takeshi Oono, Kenji Nakata, Tooru Ueno, Hidehiro Oomae, Shigeharu Minami +1 more | 2011-10-11 |
| 7862289 | Vacuum processing apparatus and vacuum processing method | Takeshi Oono, Kenji Nakata, Tooru Ueno, Hidehiro Oomae, Shigeharu Minami +1 more | 2011-01-04 |
| 7476073 | Vacuum processing method | Takeshi Oono, Kenji Nakata, Tooru Ueno, Hidehiro Oomae, Shigeharu Minami +1 more | 2009-01-13 |
| 6941185 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara | 2005-09-06 |
| 6920369 | Methods of operating vacuum processing equipment and methods of processing wafers | Tooru Ueno, Shigeru Nakamoto, Hideki Yamasaki, Kouji Nishihata | 2005-07-19 |
| 6917844 | Vacuum process apparatus and method of operating the same | Tomoyuki Kawano, Kouji Nishihata, Tetsuya Tahara, Hideki Yamasaki | 2005-07-12 |
| 6885906 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara | 2005-04-26 |
| 6853872 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara | 2005-02-08 |
| 6795745 | Methods of operating vacuum processing equipment and methods of processing wafers | Tooru Ueno, Shigeru Nakamoto, Hideki Yamasaki, Kouji Nishihata | 2004-09-21 |
| 6745093 | Vacuum process apparatus and method of operating the same | Tomoyuki Kawano, Kouji Nishihata, Tetsuya Tahara, Hideki Yamasaki | 2004-06-01 |
| 6714832 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara | 2004-03-30 |
| 6069096 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara | 2000-05-30 |