Issued Patents All Time
Showing 51–73 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6263588 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2001-07-24 |
| 6112431 | Vacuum processing and operating method | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2000-09-05 |
| 6108929 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2000-08-29 |
| 6070341 | Vacuum processing and operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2000-06-06 |
| 6069096 | Operating method of vacuum processing system and vacuum processing system | Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2000-05-30 |
| 6055740 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2000-05-02 |
| 6044576 | Vacuum processing and operating method using a vacuum chamber | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2000-04-04 |
| 6012235 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2000-01-11 |
| 5950330 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 1999-09-14 |
| 5784799 | Vacuum processing apparatus for substate wafers | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 1998-07-28 |
| 5685684 | Vacuum processing system | Shigekazu Kato, Naoyuki Tamura, Tsunehiko Tsubone, Atsushi Itou, Kenji Nakata +1 more | 1997-11-11 |
| 5673750 | Vacuum processing method and apparatus | Tsunehiko Tsubone, Naoyuki Tamura, Shigekazu Kato, Atsushi Itou | 1997-10-07 |
| 5663884 | Multiprocessing apparatus | Naoyuki Tamura, Shigekazu Kato, Atsushi Itou, Tsunehiko Tsubone | 1997-09-02 |
| 5661913 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 1997-09-02 |
| 5553396 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 1996-09-10 |
| 5457896 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 1995-10-17 |
| 5448470 | Multiprocessing apparatus | Naoyuki Tamura, Shigekazu Kato, Atsushi Itou, Tsunehiko Tsubone | 1995-09-05 |
| 5445484 | Vacuum processing system | Shigekazu Kato, Naoyuki Tamura, Tsunehiko Tsubone, Atsushi Itou | 1995-08-29 |
| 5349762 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 1994-09-27 |
| 5320982 | Wafer cooling method and apparatus | Tsunehiko Tsubone, Naoyuki Tamura, Shigekazu Kato, Atsushi Itou | 1994-06-14 |
| 5314509 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 1994-05-24 |
| 5078851 | Low-temperature plasma processor | Shigekazu Kato, Atsushi Itou, Tsunehiko Tsubone, Naoyuki Tamura | 1992-01-07 |
| 4527698 | Method of and apparatus for supporting rope of crane having articulating structure | Ichiro Nakazima, Mituo Hirata | 1985-07-09 |