Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE39824 | Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2007-09-11 |
| RE39775 | Vacuum processing operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2007-08-21 |